Experimental identification of grating profile by neuralnetwork classifier in optical scatterometry
Keyword(s):
2017 ◽
Vol 3
(2)
◽
pp. 21-32
◽
2019 ◽
Vol 14
(3)
◽
pp. 211-225
◽
1997 ◽
Vol 13
(3)
◽
pp. 237-259
◽
2013 ◽
Vol 486
◽
pp. 205-210