Osmium atomic-oxygen protection by an iridium overcoat for increased extreme-ultraviolet grating efficiency
2017 ◽
Vol 529
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pp. 356-362
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2014 ◽
Vol 1058
◽
pp. 290-293
Keyword(s):
1991 ◽
Vol 28
(6)
◽
pp. 730-733
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2018 ◽
Vol 189
(03)
◽
pp. 323-334
◽
Keyword(s):
Keyword(s):