Dynamics of a micro-electro-mechanical system associated with an atomic force microscope considering squeeze film damping
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1992 ◽
Vol 50
(2)
◽
pp. 1146-1147
1989 ◽
Vol 47
◽
pp. 32-33
1993 ◽
Vol 51
◽
pp. 704-705
2004 ◽
Vol 28
(3)
◽
pp. 301-304
◽