Characterization and control of laser plasma flux parameters for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 6901 ◽  
Author(s):  
Martin Richardson ◽  
William T. Silfvast ◽  
Howard A. Bender ◽  
Art Hanzo ◽  
Victor P. Yanovsky ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Flux ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection ◽  
And Control

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

1993 ◽  
Vol 32 (34) ◽  
pp. 6934 ◽  
Author(s):  
Steven J. Haney ◽  
Kurt W. Berger ◽  
Glenn D. Kubiak ◽  
Paul D. Rockett ◽  
John Hunter
Keyword(s):  
Laser Plasma ◽  
High Speed ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Laser plasma sources for soft X-ray projection lithography

1994 ◽  
Vol 4 (9) ◽  
pp. 1669-1677 ◽  
Author(s):  
F. Bijkerk ◽  
L. Shmaenok ◽  
A. van Honk ◽  
R. Bastiaensen ◽  
Yu. Ya. Platonov ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Application of laser plasma sources in soft x-ray projection lithography

1994 ◽  
Author(s):  
Daniel A. Tichenor ◽  
Glenn D. Kubiak ◽  
Michael E. Malinowski ◽  
Richard H. Stulen ◽  
Steven J. Haney ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

High-power laser plasma sources: Soft x-ray projection lithography and other applications

1993 ◽  
Author(s):  
G. D. Kubiak ◽  
K. W. Berger ◽  
S. J. Haney ◽  
D. A. Tichenor ◽  
R. H. Stulen ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Laser plasma sources for soft x-ray projection lithography

1993 ◽  
Author(s):  
Martin C. Richardson ◽  
William T. Silfvast ◽  
Howard Bender III ◽  
Art Hanzo ◽  
Feng Jin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Issues of laser plasma sources for soft x-ray projection lithography

1994 ◽  
Vol 23 (1-4) ◽  
pp. 211-214 ◽  
Author(s):  
L. Shmaenok ◽  
F. Bijkerk ◽  
E. Louis ◽  
A. van Honk ◽  
M.J. van der Wiel ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Characterization of AZ PN114 resist for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Resist performance in 5nm and 13nm soft X-ray projection lithography

1995 ◽  
Vol 27 (1-4) ◽  
pp. 317-320
Author(s):  
Hiroaki Oizumi ◽  
Masayuki Ohtani ◽  
Yoshio Yamashita ◽  
Katsuhiko Murakami ◽  
Hiroshi Nagata ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection
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