Transparent, conducting indium tin oxide films formed on low or medium temperature substrates by ion-assisted deposition

1987 ◽  
Vol 26 (24) ◽  
pp. 5204 ◽  
Author(s):  
J. A. Dobrowolski ◽  
F. C. Ho ◽  
D. Menagh ◽  
R. Simpson ◽  
A. Waldorf
1983 ◽  
Author(s):  
S. S. Bawa ◽  
S. S. Sharma ◽  
S. A. Agnihotry ◽  
A. M. Biradar ◽  
Subhas Chandra

2016 ◽  
Vol 27 (5) ◽  
pp. 4913-4922 ◽  
Author(s):  
M. Duta ◽  
M. Anastasescu ◽  
J. M. Calderon-Moreno ◽  
L. Predoana ◽  
S. Preda ◽  
...  

2002 ◽  
Vol 721 ◽  
Author(s):  
Nabil D. Bassim ◽  
Valentin Craciun ◽  
Doina Craciun ◽  
Rajiv K. Singh

AbstractIndium tin oxide is one of the most used transparent conducting oxides. In order to reduce the processing thermal budget and enhance compatibility of these films for such applications as transparent electrodes for solar cells and flat panel displays, lower deposition temperatures are desirable. The addition of a non-thermal energy source during deposition, in this case, a mercury lamp, has the ability to lower the required substrate temperature during processing while increasing the oxygen content of the deposited film through the added contribution of ionized species into the deposited material. We investigated the microstructure of UV-assisted pulsed laser deposited indium tin oxide films. Comparisons between the UV and non-UV films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.


2001 ◽  
Vol 40 (Part 2, No. 4B) ◽  
pp. L401-L403 ◽  
Author(s):  
Akio Suzuki ◽  
Tatsuhiko Matsushita ◽  
Takanori Aoki ◽  
Yoshitaka Yoneyama ◽  
Masahiro Okuda

1989 ◽  
Author(s):  
Paul G. Snyder ◽  
Bhola N. De ◽  
John A. .. WoolIam ◽  
T. J. Coutts ◽  
X. Li

2003 ◽  
Vol 21 (4) ◽  
pp. 1351-1354 ◽  
Author(s):  
Shinji Takayama ◽  
Toshifumi Sugawara ◽  
Akira Tanaka ◽  
Tokuji Himuro

Sign in / Sign up

Export Citation Format

Share Document