Deposition Of Transparent Conducting Indium - Tin Oxide Films By Dc Sputtering

1983 ◽  
Author(s):  
S. S. Bawa ◽  
S. S. Sharma ◽  
S. A. Agnihotry ◽  
A. M. Biradar ◽  
Subhas Chandra
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Dc Sputtering ◽  
Transparent Conducting ◽  
Tin Oxide Films

Sol–gel versus sputtering indium tin oxide films as transparent conducting oxide materials

2016 ◽  
Vol 27 (5) ◽  
pp. 4913-4922 ◽  
Author(s):  
M. Duta ◽  
M. Anastasescu ◽  
J. M. Calderon-Moreno ◽  
L. Predoana ◽  
S. Preda ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Transparent Conducting Oxide ◽  
Sol Gel ◽  
Oxide Films ◽  
Oxide Materials ◽  
Transparent Conducting ◽  
Tin Oxide Films

Microstructural Study of Ultraviolet-Assisted Pulse Laser depoisted Indium Tin Oxide Films

2002 ◽  
Vol 721 ◽  
Author(s):  
Nabil D. Bassim ◽  
Valentin Craciun ◽  
Doina Craciun ◽  
Rajiv K. Singh
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Flat Panel Displays ◽  
Thermal Budget ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Deposited Film ◽  
Tin Oxide Films ◽  
Made In

AbstractIndium tin oxide is one of the most used transparent conducting oxides. In order to reduce the processing thermal budget and enhance compatibility of these films for such applications as transparent electrodes for solar cells and flat panel displays, lower deposition temperatures are desirable. The addition of a non-thermal energy source during deposition, in this case, a mercury lamp, has the ability to lower the required substrate temperature during processing while increasing the oxygen content of the deposited film through the added contribution of ionized species into the deposited material. We investigated the microstructure of UV-assisted pulsed laser deposited indium tin oxide films. Comparisons between the UV and non-UV films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.

Transparent, conducting indium tin oxide films formed on low or medium temperature substrates by ion-assisted deposition

1987 ◽  
Vol 26 (24) ◽  
pp. 5204 ◽  
Author(s):  
J. A. Dobrowolski ◽  
F. C. Ho ◽  
D. Menagh ◽  
R. Simpson ◽  
A. Waldorf
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Medium Temperature ◽  
Transparent Conducting ◽  
Tin Oxide Films
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