Thickness profile measurement of the double-layered glass substrate based on transmission-type spectral domain interferometer

2016 ◽  
Author(s):  
Jungjae Park ◽  
Jaeseok Bae ◽  
Heulbi Ahn ◽  
Jonghan Jin
Keyword(s):  
Glass Substrate ◽  
Spectral Domain ◽  
Profile Measurement ◽  
Thickness Profile

scholarly journals Cosine Error-Free Metrology Tool Path Planning for Thickness Profile Measurements

2020 ◽  
Vol 143 (4) ◽  
Author(s):  
Xiangyu Guo ◽  
ChaBum Lee
Keyword(s):  
Path Planning ◽  
Wall Thickness ◽  
Tool Path ◽  
Measuring System ◽  
Profile Measurement ◽  
Thin Wall ◽  
Tool Path Planning ◽  
Thickness Profile ◽  
Thin Walls ◽  
Displacement Sensors

Abstract This paper presents a novel thickness profile measuring system that measures double-sided thin pipe wall surfaces in a non-contact, continuous, cosine error-free, and fast manner. The surface metrology tool path was developed to align the displacement sensors always normal to the double-sided surfaces to remove cosine error. A pair of capacitive-type sensors that were placed on the rotary and linear axes simultaneously scans the inner and outer surfaces of thin walls. Because the rotational error of the rotary axis can severely affect the accuracy in thickness profile measurement, such error was initially characterized by a reversal method. It was compensated for along the rotational direction while measuring the measurement target. Two measurement targets (circular and elliptical metal pipe-type thin walls) were prepared to validate the developed measurement method and system. Not only inner and outer surface profiles but also thin-wall thickness profiles were measured simultaneously. Based on the output data, the circularity and wall thickness variation were calculated. The thickness profile results showed a good agreement with those obtained by a contact-type micrometer (1-µm resolution) at every 6-deg interval. The uncertainty budget for this measuring system with metrology tool path planning was estimated at approximately 1.4 µm.

Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

2008 ◽  
Vol 46 (2) ◽  
pp. 179-184 ◽  
Author(s):  
Young-Min Hwang ◽  
Sung-Won Yoon ◽  
Jung-Hwan Kim ◽  
Souk Kim ◽  
Heui-Jae Pahk
Keyword(s):  
Thin Film ◽  
Wavelet Transform ◽  
Film Thickness ◽  
Profile Measurement ◽  
Thin Film Thickness ◽  
Thickness Profile ◽  
Wavelength Scanning

Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter

2002 ◽  
Vol 13 (7) ◽  
pp. L1-L5 ◽  
Author(s):  
Daesuk Kim ◽  
Soohyun Kim ◽  
Hong Jin Kong ◽  
Yunwoo Lee ◽  
Yoon Keun Kwak
Keyword(s):  
Detection Method ◽  
Peak Detection ◽  
Tunable Filter ◽  
Profile Measurement ◽  
Thickness Profile
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