Effect of Gas Flow Rate on the High-Rate, Localized Jet-Deposition of Silicon in SiH4/H2 PE-CVD
2014 ◽
Vol 47
(6)
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pp. 478-482
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1966 ◽
Vol 31
(3)
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pp. 1152-1161
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1998 ◽
Vol 63
(6)
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pp. 881-898