Quasi Nondestructive Elemental Analysis of Solid Surface in Liquid by Long-pulse Laser Ablation Plume Spectroscopy

2007 ◽  
Vol 36 (4) ◽  
pp. 508-509 ◽  
Author(s):  
Tetsuo Sakka ◽  
Hisayuki Oguchi ◽  
Satoru Masai ◽  
Yukio H. Ogata
Keyword(s):  
Laser Ablation ◽  
Pulse Laser ◽  
Solid Surface ◽  
Elemental Analysis ◽  
Pulse Laser Ablation ◽  
Ablation Plume ◽  
Long Pulse

Studies of craters’ dimension for long-pulse laser ablation of metal targets at various experimental conditions

2008 ◽  
Vol 254 (9) ◽  
pp. 2797-2803 ◽  
Author(s):  
D. Margarone ◽  
L. Láska ◽  
L. Torrisi ◽  
S. Gammino ◽  
J. Krása ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Experimental Conditions ◽  
Long Pulse

Single and double long pulse laser ablation of aluminum induced in air and water ambient

2017 ◽  
Vol 396 ◽  
pp. 732-739 ◽  
Author(s):  
Marzieh Akbari Jafarabadi ◽  
Mohammad Hossein Mahdieh
Keyword(s):  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Long Pulse

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

Numerical modeling of ultrashort-pulse laser ablation of silicon

2009 ◽  
Vol 255 (17) ◽  
pp. 7605-7609 ◽  
Author(s):  
D.P. Korfiatis ◽  
K.-A. Th. Thoma ◽  
J.C. Vardaxoglou
Keyword(s):  
Numerical Modeling ◽  
Laser Ablation ◽  
Pulse Laser ◽  
Ultrashort Pulse ◽  
Pulse Laser Ablation ◽  
Ultrashort Pulse Laser
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