Formation of Carbon Films from C2H6–H2by ECR Plasma CVD by Application of a Negative DC Bias

1993 ◽  
Vol 66 (3) ◽  
pp. 975-977
Author(s):  
Kazunori Maruyama ◽  
Kiichiro Kamata ◽  
Masaki Yamamoto ◽  
Toshiyuki Morinaga ◽  
Kozo Kuchitsu
Keyword(s):  
Carbon Films ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Dc Bias

scholarly journals Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

2008 ◽  
Vol 31 (5) ◽  
pp. 813-818 ◽  
Author(s):  
S. B. Singh ◽  
M. Pandey ◽  
N. Chand ◽  
A. Biswas ◽  
D. Bhattacharya ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Optical And Mechanical Properties

scholarly journals Emission Spectra and Morphology of Carbon Films by ECR Plasma CVD

1991 ◽  
Vol 99 (1152) ◽  
pp. 720-722 ◽  
Author(s):  
Kazunori MARUYAMA ◽  
Kiichiro KAMATA ◽  
Tohru INOUE ◽  
Isao TANABE
Keyword(s):  
Emission Spectra ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Ecr Plasma

DC Bias Effects on Growth of a-Ge:H in Coaxial-Type ECR Plasma

1989 ◽  
Vol 28 (Part 1, No. 5) ◽  
pp. 849-855 ◽  
Author(s):  
Takeshi Aoki ◽  
Seiichi Kato ◽  
Masataka Hirose ◽  
Yasuo Nishikawa
Keyword(s):  
Ecr Plasma ◽  
Dc Bias

scholarly journals Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD

2012 ◽  
Vol 63 (1) ◽  
pp. 35
Author(s):  
Shuji YAMAMOTO ◽  
Noriaki HIDAKA ◽  
Atsuo KAWANA ◽  
Chitoshi MASUDA
Keyword(s):  
Tribological Behavior ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd

Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

2013 ◽  
Vol 423-426 ◽  
pp. 756-761
Author(s):  
Li Jun Sang ◽  
Qiang Chen ◽  
Zhong Wei Liu ◽  
Zheng Duo Wang
Keyword(s):  
Friction Coefficient ◽  
Electron Cyclotron Resonance ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Negative Bias ◽  
Film Property ◽  
Ecr Plasma ◽  
Peak Intensity ◽  
Stretching Vibration

Diamond-like carbon films (DLC) were deposited on single crystalline silicon surface under different RF negative bias in microwave electron cyclotron resonance (ECR) plasma source. The chemical structure and morphology were characterized by Fourier transformation infrared spectroscopy (FTIR) and atomic force microscopy (AFM). The friction coefficient of films was measured to examine the film property later. The results show that the smooth and compact deposited films were typical hydrogenated diamond-like carbon with CHn stretching vibration in 2800-3000cm-1. It is noticed that with the increase of RF bias on the substrate the peak intensity for C-H stretching vibration in spectrum between 2800cm-1~3000cm-1 increased at the beginning and then decreased, which caused the friction coefficient of the film being smaller and then larger in reverse. In 50W RF biased power one can obtain the maximum-CHn peak intensity and the minimum friction coefficient.

scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

Diamond-like carbon films from CO source gas by RF plasma CVD method

2014 ◽  
Vol 54 (1S) ◽  
pp. 01AD04 ◽  
Author(s):  
Yuki Yasuoka ◽  
Toru Harigai ◽  
Jun-Seok Oh ◽  
Hiroshi Furuta ◽  
Akimitsu Hatta ◽  
...  
Keyword(s):  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Cvd Method
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