Design analysis and experimental study of aerostatic linear guideways used in a high acceleration and high precision xy stage

Author(s):  
Y. T. Li ◽  
H Ding
2007 ◽  
Author(s):  
Yang Guo-biao ◽  
Fang Ru-hua ◽  
Zeng Wei-ming ◽  
Zhu Qi-rong

2007 ◽  
Vol 78 (4) ◽  
pp. 463-469 ◽  
Author(s):  
Thomas Baad-Hansen ◽  
Søren Kold ◽  
Bart L Kaptein ◽  
Kjeld Søballe

2019 ◽  
Vol 1187 (4) ◽  
pp. 042016
Author(s):  
Yifan Zhou ◽  
Xingbao Liu ◽  
Yangqiu Xia ◽  
Shaopeng Cai

Author(s):  
J. H. Wu ◽  
H Ding

This paper studies the repetitive motion control of a high-acceleration and high-precision platform driven by linear motors. The control scheme comprises an anticipatory iterative learning control (A-ILC) component and a cascaded control structure including an inner-loop velocity PI controller and an outer-loop position P controller. During the motion process, the cascaded controller remains invariant while the A-ILC adjusts the reference command cycle by cycle to achieve better performance. Experiments are carried out to validate the proposed control structure. The results confirm that the proposed control scheme can improve the system performance significantly in both low-speed trajectory tracking motions and fast point-to-point motion. In the experiments, P-type and D-type ILCs are also utilized to adjust the reference command. Compared with the A type, P-type ILC leads to larger tracking error bounds and D-type ILC lacks a fast convergence rate for low-speed motions, while for fast point-to-point motion these two types of ILC are unable to work well.


2013 ◽  
Vol 745-746 ◽  
pp. 430-435 ◽  
Author(s):  
Shao Hua Zhen ◽  
Li Bao An ◽  
Yan Yan Liu

Study of the effect of dielectrophoresis (DEP) parameters is important in high-precision DEP assembly of carbon nanotubes (CNTs). The DEP parameters usually considered in the literature include the magnitude and frequency of the applied voltage, the assembly time, the concentration of the CNT suspension, and the geometry of the electrodes. This paper reviews the current progresses on both numerical and experimental study of the CNT assembly by DEP, especially the influence of the DEP parameters on the assembly process and results. The review shows that the magnitude of the applied voltage affects the DEP force and the number of deposited CNTs. The assembly time and CNT concentration influence the density of deposited CNTs. Different electrode geometries have an effect on the distribution of the electric field. The electrode spacing changes the field strength and the direction of the field gradient. The related discussion is presented as well.


2010 ◽  
Vol 34-35 ◽  
pp. 1840-1844
Author(s):  
Quan Bai ◽  
Ke Xiang Wei ◽  
Shi Sha Zhu

The positioning system with high acceleration and high precision determines the speed and quality of bonding, which is the core component in a wire bonder, and influences the cost and reliability of the chip. The mode characteristics of the high acceleration and high precision positioning system were analyzed using ABAQUS. The results show that the system has different vibration characteristics in different resonance mode, and also has the features of mode denseness and complicated vibration mode.


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