Design analysis and experimental study of aerostatic linear guideways used in a high acceleration and high precision xy stage
2007 ◽
Vol 221
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pp. 1-9
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2019 ◽
Vol 1187
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pp. 042016
2007 ◽
Vol 221
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pp. 781-789
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2013 ◽
Vol 745-746
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pp. 430-435
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