Porous Silicon-Based Optical Chemical Sensors

2015 ◽  
pp. 69-94 ◽  
Author(s):  
Luca De Stefano ◽  
Ilaria Rea ◽  
Alessandro Caliò ◽  
Jane Politi ◽  
Monica Terracciano ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Chemical Sensors ◽  
Optical Chemical Sensors ◽  
Silicon Based

Porous silicon microcavities as optical chemical sensors

2000 ◽  
Vol 76 (18) ◽  
pp. 2523-2525 ◽  
Author(s):  
V. Mulloni ◽  
L. Pavesi
Keyword(s):  
Porous Silicon ◽  
Chemical Sensors ◽  
Optical Chemical Sensors

scholarly journals Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper

2015 ◽  
Vol 2015 ◽  
pp. 1-10 ◽  
Author(s):  
Tero Jalkanen ◽  
Anni Määttänen ◽  
Ermei Mäkilä ◽  
Jaani Tuura ◽  
Martti Kaasalainen ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Smart Cities ◽  
Low Cost ◽  
Electrical Characterization ◽  
Fabrication Process ◽  
Sensing Element ◽  
Paper Substrate ◽  
Roll To Roll ◽  
Silver Electrodes ◽  
Silicon Based

A roll-to-roll compatible fabrication process of porous silicon (pSi) based sensing elements for a real-time humidity monitoring is described. The sensing elements, consisting of printed interdigitated silver electrodes and a spray-coated pSi layer, were fabricated on a coated paper substrate by a two-step process. Capacitive and resistive responses of the sensing elements were examined under different concentrations of humidity. More than a three orders of magnitude reproducible decrease in resistance was measured when the relative humidity (RH) was increased from 0% to 90%. A relatively fast recovery without the need of any refreshing methods was observed with a change in RH. Humidity background signal and hysteresis arising from the paper substrate were dependent on the thickness of sensing pSi layer. Hysteresis in most optimal sensing element setup (a thick pSi layer) was still noticeable but not detrimental for the sensing. In addition to electrical characterization of sensing elements, thermal degradation and moisture adsorption properties of the paper substrate were examined in connection to the fabrication process of the silver electrodes and the moisture sensitivity of the paper. The results pave the way towards the development of low-cost humidity sensors which could be utilized, for example, in smart packaging applications or in smart cities to monitor the environment.

Porous silicon–based MEMS

2010 ◽  
pp. 481-502
Author(s):  
Gerhard Müller ◽  
Alois Friedberger ◽  
Kathrin Knese
Keyword(s):  
Porous Silicon ◽  
Silicon Based

Porous Silicon-Based Photonic Biosensors: Current Status and Emerging Applications

2018 ◽  
Vol 91 (1) ◽  
pp. 441-467 ◽  
Author(s):  
Sofia Arshavsky-Graham ◽  
Naama Massad-Ivanir ◽  
Ester Segal ◽  
Sharon Weiss
Keyword(s):  
Porous Silicon ◽  
Current Status ◽  
Silicon Based ◽  
Photonic Biosensors
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