Reliability Issues in Planar and Nonplanar (FinFET) Device Architectures

Micro- and Nanoelectronics ◽

10.1201/b17597-7 ◽

2017 ◽

pp. 137-155

Author(s):

Barry P. Linder ◽

Eduard A. Cartier ◽

Siddarth A. Krishnan ◽

Chunyan E. Tian ◽

Vijay Narayanan

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