Surface Patterning, Drilling, and Cutting

2013 ◽  
pp. 243-280 ◽  
Keyword(s):  
2020 ◽  
pp. 2000689
Author(s):  
Jenna M. Shapiro ◽  
Bruce W. Drinkwater ◽  
Adam W. Perriman ◽  
Mike Fraser

Author(s):  
Lulu Zhang ◽  
Brent Shu ◽  
Robert Birkmire ◽  
Steve Hegedus ◽  
Ujjwal Das

Langmuir ◽  
2011 ◽  
Vol 27 (12) ◽  
pp. 7349-7352 ◽  
Author(s):  
Ammar Azioune ◽  
Nicolas Carpi ◽  
Jenny Fink ◽  
Mohamed M. Chehimi ◽  
Damien Cuvelier ◽  
...  

Author(s):  
Kun Yang ◽  
Jirong Shi ◽  
Lei Wang ◽  
Yingzhi Chen ◽  
Chunyong Liang ◽  
...  

Nanomaterials ◽  
2018 ◽  
Vol 8 (11) ◽  
pp. 910 ◽  
Author(s):  
Rongbo Wu ◽  
Min Wang ◽  
Jian Xu ◽  
Jia Qi ◽  
Wei Chu ◽  
...  

In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.


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