Digital Holography for 3D Metrology

2013 ◽  
pp. 151-194
Author(s):  
Anand Asundi ◽  
Qu Weijuan ◽  
Chee Choo ◽  
Kapil Dev ◽  
Yan Hao
Keyword(s):  
Digital Holography ◽  
3D Metrology

Digital holography with a set of two close wavelengths for height measurement of solder bumps

2020 ◽  
Vol 59 (SO) ◽  
pp. SOOE03
Author(s):  
Hiroyuki Ishigaki ◽  
Takahiro Mamiya ◽  
Yoshio Hayasaki
Keyword(s):  
Digital Holography ◽  
Height Measurement ◽  
Solder Bumps

Development of 72K Ultra-High-Resolution SLMoG system for high-capacity digital holography image

2019 ◽  
pp. 952
Author(s):  
Jae-Eun Pi ◽  
Ji-Hun Choi ◽  
Jong-Heon Yang ◽  
Chi-Young Hwang ◽  
Gi Heon Kim ◽  
...  
Keyword(s):  
High Resolution ◽  
Digital Holography ◽  
High Capacity

scholarly journals Combined Reduced Phase Dual-Directional Illumination Digital Holography and Speckle Displacements for Shape Measurement

2019 ◽  
Vol 2019 ◽  
pp. 1-6
Author(s):  
Davood Khodadad
Keyword(s):  
Phase Difference ◽  
Digital Holography ◽  
Relative Phase ◽  
Groove Depth ◽  
Phase Unwrapping ◽  
Shape Measurement ◽  
Phase Ambiguity ◽  
Holographic Method ◽  
Height Range ◽  
Phase Differences

We present a digital holographic method to increase height range measurement with a reduced phase ambiguity using a dual-directional illumination. Small changes in the angle of incident illumination introduce phase differences between the recorded complex fields. We decrease relative phase difference between the recorded complex fields 279 and 139 times by changing the angle of incident 0.5° and 1°, respectively. A two cent Euro coin edge groove is used to measure the shape. The groove depth is measured as ≈300  μm. Further, numerical refocusing and analysis of speckle displacements in two different planes are used to measure the depth without a use of phase unwrapping process.

Accurate reconstruction for the measurement of tilt surfaces with digital holography

2021 ◽  
pp. 127135
Author(s):  
He Yuan ◽  
Xiangchao Zhang ◽  
Feili Wang ◽  
Rui Xiong ◽  
Wei Wang ◽  
...  
Keyword(s):  
Digital Holography ◽  
Accurate Reconstruction

Phase map retrieval in digital holography: avoiding the undersampling effect by a lateral shear approach

2007 ◽  
Vol 32 (15) ◽  
pp. 2233 ◽  
Author(s):  
P. Ferraro ◽  
C. Del Core ◽  
L. Miccio ◽  
S. Grilli ◽  
S. De Nicola ◽  
...  
Keyword(s):  
Digital Holography ◽  
Lateral Shear ◽  
Phase Map

Measurement of thermal effects in solid-state laser gain medium by digital holography

2014 ◽  
Author(s):  
Xiaoyuan Peng ◽  
Yang Yu ◽  
Zhaomin Wang ◽  
Weijuan Qu ◽  
Chee Yuen Cheng ◽  
...  
Keyword(s):  
Solid State ◽  
Thermal Effects ◽  
Digital Holography ◽  
Gain Medium ◽  
Solid State Laser ◽  
State Laser ◽  
Laser Gain

Synthetic aperture in terahertz in-line digital holography for resolution enhancement

2015 ◽  
Vol 55 (3) ◽  
pp. A43 ◽  
Author(s):  
Haochong Huang ◽  
Lu Rong ◽  
Dayong Wang ◽  
Weihua Li ◽  
Qinghua Deng ◽  
...  
Keyword(s):  
Digital Holography ◽  
Resolution Enhancement ◽  
Synthetic Aperture

scholarly journals Direct to digital holography for semiconductor wafer defect detection and review

2002 ◽  
Author(s):  
C. E. Thomas, Jr. ◽  
Tracy M. Bahm ◽  
Larry R. Baylor ◽  
Philip R. Bingham ◽  
Steven W. Burns ◽  
...  
Keyword(s):  
Defect Detection ◽  
Digital Holography ◽  
Semiconductor Wafer

Parallel Phase-Shifting Digital Holography Capable of Simultaneously Capturing Visible and Invisible Three-Dimensional Information

2010 ◽  
Vol 6 (10) ◽  
pp. 472-478 ◽  
Author(s):  
Takashi Kakue ◽  
Kenichi Ito ◽  
Tatsuki Tahara ◽  
Yasuhiro Awatsuji ◽  
Kenzo Nishio ◽  
...  
Keyword(s):  
Digital Holography ◽  
Three Dimensional ◽  
Phase Shifting
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