scholarly journals Direct to digital holography for semiconductor wafer defect detection and review

2002 ◽  
Author(s):  
C. E. Thomas, Jr. ◽  
Tracy M. Bahm ◽  
Larry R. Baylor ◽  
Philip R. Bingham ◽  
Steven W. Burns ◽  
...  
Keyword(s):  
Defect Detection ◽  
Digital Holography ◽  
Semiconductor Wafer

scholarly journals Semiconductor wafer defect detection using digital holography

2003 ◽  
Author(s):  
Mark A. Schulze ◽  
Martin A. Hunt ◽  
Edgar Voelkl ◽  
Joel D. Hickson ◽  
William R. Usry ◽  
...  
Keyword(s):  
Defect Detection ◽  
Digital Holography ◽  
Semiconductor Wafer

Defect detection on semiconductor wafer surfaces

2005 ◽  
Vol 77 (3-4) ◽  
pp. 337-346 ◽  
Author(s):  
N.G. Shankar ◽  
Z.W. Zhong
Keyword(s):  
Defect Detection ◽  
Semiconductor Wafer ◽  
Wafer Surfaces

Study on Defect Detection Technology for Bridge Deck Pavements

2017 ◽  
Vol 19 (6) ◽  
pp. 38
Author(s):  
Chengchao Guo ◽  
Pengfei Xu ◽  
Can Cui
Keyword(s):  
Defect Detection ◽  
Bridge Deck ◽  
Detection Technology

Model Based Defect Detection in Multi-Dimensional Vector Spaces

2011 ◽  
Vol 131 (9) ◽  
pp. 1633-1641
Author(s):  
Toshifumi Honda ◽  
Kenji Obara ◽  
Minoru Harada ◽  
Hajime Igarashi
Keyword(s):  
Defect Detection ◽  
Vector Spaces ◽  
Dimensional Vector ◽  
Model Based
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