Modeling, Design, and Simulation of N/MEMS by Integrating Finite Element, Lumped Element, and System Level Analyses
2020 ◽
Vol 67
(12)
◽
pp. 10055-10064
◽
2003 ◽
Vol 04
(02)
◽
pp. 385-388
◽
Keyword(s):
2015 ◽
Vol 28
(3)
◽
pp. 325-344
◽
2013 ◽
Vol 133
(5)
◽
pp. 3411-3411
Keyword(s):
Keyword(s):