Residual Stress of TiN Multilayer Coatings Alternately Deposited by Arc Ion Plating and Magnetron Sputtering

Haijuan Mei; Shengsheng Zhao; Qimin Wang

doi:10.1166/nnl.2017.2393

Residual Stress of TiN Multilayer Coatings Alternately Deposited by Arc Ion Plating and Magnetron Sputtering

Nanoscience and Nanotechnology Letters ◽

10.1166/nnl.2017.2393 ◽

2017 ◽

Vol 9 (6) ◽

pp. 885-891 ◽

Cited By ~ 2

Author(s):

Haijuan Mei ◽

Shengsheng Zhao ◽

Qimin Wang

Keyword(s):

Residual Stress ◽

Magnetron Sputtering ◽

Multilayer Coatings ◽

Arc Ion Plating ◽

Ion Plating

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Multi-arc ion plating and DC magnetron sputtering integrated technique for high-performance Al,C-co-doped δ-TiN quaternary films

Corrosion Science ◽

10.1016/j.corsci.2021.109261 ◽

2021 ◽

Vol 182 ◽

pp. 109261

Author(s):

Ruishan Zhao ◽

Xin Ren ◽

Kang Wen ◽

Hua liu ◽

Meisong Huang ◽

...

Keyword(s):

Magnetron Sputtering ◽

High Performance ◽

Dc Magnetron Sputtering ◽

Arc Ion Plating ◽

Ion Plating ◽

Integrated Technique ◽

Co Doped

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Deposition of Ni–Al–Y alloy films using a hybrid arc ion plating and magnetron sputtering system

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.08.138 ◽

2006 ◽

Vol 200 (20-21) ◽

pp. 5877-5883 ◽

Cited By ~ 14

Author(s):

J.T. Chang ◽

A. Davison ◽

J.L. He ◽

A. Matthews

Keyword(s):

Magnetron Sputtering ◽

Arc Ion Plating ◽

Alloy Films ◽

Ion Plating ◽

Sputtering System

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Structure, mechanical and tribological properties of self-toughening TiSiN/Ag multilayer coatings on Ti6Al4V prepared by arc ion plating

Applied Surface Science ◽

10.1016/j.apsusc.2016.06.024 ◽

2016 ◽

Vol 386 ◽

pp. 224-233 ◽

Cited By ~ 45

Author(s):

Chaoqun Dang ◽

Jinlong Li ◽

Yue Wang ◽

Jianmin Chen

Keyword(s):

Tribological Properties ◽

Multilayer Coatings ◽

Arc Ion Plating ◽

Ion Plating ◽

Mechanical And Tribological Properties

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Structure and properties of TiSiN/Cu multilayer coatings deposited on Ti6Al4V prepared by arc ion plating

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2019.05.013 ◽

2019 ◽

Vol 372 ◽

pp. 16-25 ◽

Cited By ~ 3

Author(s):

Xuebing Bai ◽

Jinlong Li ◽

Lihui Zhu

Keyword(s):

Multilayer Coatings ◽

Structure And Properties ◽

Arc Ion Plating ◽

Ion Plating

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Protection Properties of TiN Coating Prepared by Arc Ion Plating and Magnetron Sputtering on TC11 Titanium Alloy

Journal of Iron and Steel Research International ◽

10.1016/s1006-706x(08)60068-0 ◽

2007 ◽

Vol 14 (5) ◽

pp. 142-146 ◽

Cited By ~ 3

Author(s):

Jian-peng YUAN ◽

Xian-jing REN ◽

Yue-guang YU ◽

Jian-gang XIE

Keyword(s):

Titanium Alloy ◽

Magnetron Sputtering ◽

Tin Coating ◽

Arc Ion Plating ◽

Ion Plating ◽

Tc11 Titanium Alloy

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Microstructures and properties of Zr/CrN multilayer coatings fabricated by multi-arc ion plating

Tribology International ◽

10.1016/j.triboint.2016.10.036 ◽

2017 ◽

Vol 106 ◽

pp. 78-87 ◽

Cited By ~ 27

Author(s):

Xiaoyan Guan ◽

Yongxin Wang ◽

Guangan Zhang ◽

Xin Jiang ◽

Liping Wang ◽

...

Keyword(s):

Multilayer Coatings ◽

Arc Ion Plating ◽

Ion Plating

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Thin TiN and TiB2 coatings with low residual stress deposited at different temperatures by cathodic arc ion plating

Surface and Coatings Technology ◽

10.1016/0257-8972(94)90212-7 ◽

1994 ◽

Vol 68-69 ◽

pp. 528-535 ◽

Cited By ~ 10

Author(s):

Anthony J. Perry ◽

Albert F. Tian ◽

James R. Treglio ◽

Chris Loomis

Keyword(s):

Residual Stress ◽

Arc Ion Plating ◽

Ion Plating ◽

Different Temperatures ◽

Cathodic Arc

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Synthesis and properties of CrNx/amorphous-WC nanocomposites prepared using hybrid arc ion plating and direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.152 ◽

2010 ◽

Vol 519 (2) ◽

pp. 751-758 ◽

Cited By ~ 10

Author(s):

Shihong Zhang ◽

Mingxi Li ◽

Yizhu He ◽

Tongyul Cho ◽

Huigon Chun ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Arc Ion Plating ◽

Ion Plating ◽

Direct Current Magnetron Sputtering

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Tribological properties, oxidation resistance and turning performance of AlTiN/AlCrSiN multilayer coatings by arc ion plating

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2018.09.027 ◽

2018 ◽

Vol 356 ◽

pp. 1-10 ◽

Cited By ~ 18

Author(s):

Quan Zhang ◽

Yuxiang Xu ◽

Tengfei Zhang ◽

Zhengtao Wu ◽

Qimin Wang

Keyword(s):

Oxidation Resistance ◽

Tribological Properties ◽

Multilayer Coatings ◽

Arc Ion Plating ◽

Ion Plating

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Oxidation and hot corrosion behavior of gradient NiCoCrAlYSiB coatings deposited by a combination of arc ion plating and magnetron sputtering techniques

Corrosion Science ◽

10.1016/j.corsci.2005.09.014 ◽

2006 ◽

Vol 48 (9) ◽

pp. 2750-2764 ◽

Cited By ~ 37

Author(s):

M.H. Guo ◽

Q.M. Wang ◽

J. Gong ◽

C. Sun ◽

R.F. Huang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Corrosion Behavior ◽

Hot Corrosion ◽

Arc Ion Plating ◽

Ion Plating

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