In-Situ Stress Shift in Cu Thin Films Caused by Deposition Interruptions: The Effect of Grain Size

2017 ◽  
Vol 17 (6) ◽  
pp. 4082-4086
Author(s):  
Seri Lee ◽  
Youngman Kim
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
In Situ Stress

In situ stress evolution in magnetron-sputtered Si-based thin films

2013 ◽  
Vol 25 (11) ◽  
pp. 2826-2830
Author(s):  
李静平 Li Jingping ◽  
方明 Fang Ming ◽  
贺洪波 He Hongbo ◽  
邵建达 Shao Jianda ◽  
李朝阳 Li Zhaoyang
Keyword(s):  
Thin Films ◽  
In Situ Stress ◽  
Stress Evolution

Field Evaluation and in Situ Stress Testing of the Organic-Diffusive Gradients in Thin-Films Passive Sampler

2018 ◽  
Vol 52 (21) ◽  
pp. 12573-12582 ◽  
Author(s):  
Jonathan K. Challis ◽  
Kevin M. Stroski ◽  
Kim H. Luong ◽  
Mark L. Hanson ◽  
Charles S. Wong
Keyword(s):  
Thin Films ◽  
Stress Testing ◽  
Field Evaluation ◽  
In Situ Stress ◽  
Passive Sampler ◽  
Diffusive Gradients

An improved optical cantilever technique using image processing for measuring in situ stress in thin films

1997 ◽  
Vol 97 (1-3) ◽  
pp. 206-211 ◽  
Author(s):  
G. Moulard ◽  
G. Contoux ◽  
G. Gardet ◽  
G. Motyl ◽  
M. Courbon
Keyword(s):  
Thin Films ◽  
Image Processing ◽  
In Situ Stress

An instrument for in-situ stress measurement in thin films during growth

2000 ◽  
Vol 128-129 ◽  
pp. 474-478 ◽  
Author(s):  
C Fitz ◽  
W Fukarek ◽  
A Kolitsch ◽  
W Möller
Keyword(s):  
Thin Films ◽  
Stress Measurement ◽  
In Situ Stress ◽  
In Situ Stress Measurement

Grain size reduction and magnetic properties improvement by in situ annealing of FePt epitaxial thin films

2007 ◽  
Vol 316 (2) ◽  
pp. e158-e161 ◽  
Author(s):  
F. Albertini ◽  
L. Nasi ◽  
F. Casoli ◽  
S. Fabbrici ◽  
P. Luches ◽  
...  
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Magnetic Properties ◽  
Size Reduction ◽  
Epitaxial Thin Films

Control of Grain Size and Texture of Poly-Si with Atomic Hydrogen Under In Situ Ellipsometric Observation

1994 ◽  
Vol 358 ◽  
Author(s):  
K. Nakamura ◽  
T. Akasaka ◽  
D. He ◽  
I. Shimizu
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Systematic Study ◽  
Atomic Hydrogen ◽  
Room Temperature ◽  
Glass Substrates ◽  
Time Observation ◽  
Real Time Observation ◽  
High Hall Mobility

ABSTRACTA systematic study was performed to fabricate poly-Si thin films on glass substrates. Amorphous tissues were efficiently removed by forming a textured structure with the aid of atomic hydrogen. According to the real-time observation by spectroscopic ellipsometry(SE), the grain growth was enhanced by permeation of atomic hydrogen into the sub-surface. Hall measurements were made over a rather wide temperature range: 100 K--350 K. A rather high Hall mobility of 20 cm2/Vs or more was obtained at room temperature due to the reduction of amorphous tissues remaining at grain boundaries.

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