Electrochemical Characterization of La0.9Sr0.1Ga0.8Mg0.2O3-  Thin Film Electrolyte Deposited by Radio Frequency Magnetron Sputtering

Y. Endo; T. Terai; A. Suzuki

doi:10.1149/06402.0183ecst

Electrochemical Characterization of La0.9Sr0.1Ga0.8Mg0.2O3- Thin Film Electrolyte Deposited by Radio Frequency Magnetron Sputtering

ECS Transactions ◽

10.1149/06402.0183ecst ◽

2014 ◽

Vol 64 (2) ◽

pp. 183-189

Author(s):

Y. Endo ◽

T. Terai ◽

A. Suzuki

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Electrochemical Characterization ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Electrolyte ◽

Film Electrolyte

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Electrochemical Characterization of La0.9Sr0.1Ga0.8Mg0.2O3-δ Thin Film Electrolyte Deposited by Radio Frequency Magnetron Sputtering

ECS Meeting Abstracts ◽

10.1149/ma2014-02/20/1009 ◽

2014 ◽

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Electrochemical Characterization ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Electrolyte ◽

Film Electrolyte

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Fabrication and Electrical Characterization of InZnO:N Thin Film Transistors Prepared by Radio Frequency Magnetron Sputtering

Journal of Electronic Materials ◽

10.1007/s11664-016-4491-8 ◽

2016 ◽

Vol 45 (7) ◽

pp. 3340-3342 ◽

Cited By ~ 4

Author(s):

Yunfei Peng ◽

Hailong Wang ◽

Wenqi Zhang ◽

Bin Li ◽

Dongzhan Zhou ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Electrical Characterization ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Simulation, Fabrication and Characterization of ZnO Based Thin Film Transistors Grown by Radio Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.5194 ◽

2012 ◽

Vol 12 (3) ◽

pp. 1880-1885 ◽

Cited By ~ 11

Author(s):

Shaivalini Singh ◽

P. Chakrabarti

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Fabrication And Characterization

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Degradation and Characterization of Resorbable Phosphate-Based Glass Thin-Film Coatings Applied by Radio-Frequency Magnetron Sputtering

ACS Applied Materials & Interfaces ◽

10.1021/acsami.5b08957 ◽

2015 ◽

Vol 7 (49) ◽

pp. 27362-27372 ◽

Cited By ~ 12

Author(s):

Bryan W. Stuart ◽

Miquel Gimeno-Fabra ◽

Joel Segal ◽

Ifty Ahmed ◽

David M. Grant

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Film Coatings ◽

Thin Film Coatings

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Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Vertically Aligned

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Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating

Thin Solid Films ◽

10.1016/j.tsf.2011.02.074 ◽

2011 ◽

Vol 519 (18) ◽

pp. 5846-5853 ◽

Cited By ~ 31

Author(s):

Atul Vir Singh ◽

Sudhir Chandra ◽

G. Bose

Keyword(s):

Aluminum Nitride ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Substrate Heating

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Pressure effect on YBa2Cu3O7 thin film growth in off‐axis radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579482 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2412-2419 ◽

Cited By ~ 10

Author(s):

S. C. Wu ◽

W. C. Tsai ◽

C. K. Huang ◽

H. T. Hsu ◽

C. J. Huang ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Film Growth ◽

Pressure Effect ◽

Radio Frequency Magnetron ◽

Thin Film Growth ◽

Radio Frequency Magnetron Sputtering

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Characterization of interface defects in BiFeO3 metal–oxide–semiconductor capacitors deposited by radio frequency magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-015-3174-1 ◽

2015 ◽

Vol 26 (8) ◽

pp. 5987-5993 ◽

Cited By ~ 7

Author(s):

Senol Kaya ◽

Ercan Yilmaz ◽

Aliekber Aktag ◽

Jan Seidel

Keyword(s):

Magnetron Sputtering ◽

Metal Oxide ◽

Radio Frequency ◽

Metal Oxide Semiconductor ◽

Radio Frequency Magnetron ◽

Oxide Semiconductor ◽

Radio Frequency Magnetron Sputtering ◽

Interface Defects

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Synthesis and characterization of LSGM thin film electrolyte by RF magnetron sputtering for LT-SOFCS

Solid State Ionics ◽

10.1016/j.ssi.2008.02.039 ◽

2008 ◽

Vol 179 (21-26) ◽

pp. 1268-1272 ◽

Cited By ~ 22

Author(s):

K. Sasaki ◽

M. Muranaka ◽

A. Suzuki ◽

T. Terai

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Synthesis And Characterization ◽

Thin Film Electrolyte ◽

Film Electrolyte

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Evaluation of lithium cobalt oxide films deposited by radio frequency magnetron sputtering as thin-film battery cathodes

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab2c45 ◽

2019 ◽

Vol 58 (8) ◽

pp. 085501

Author(s):

Der-Jun Jan ◽

Chia-Cheng Lee ◽

Yuh-Jeng Yu ◽

Heng-Wei Chiang

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cobalt Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Lithium Cobalt Oxide ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Battery ◽

Lithium Cobalt

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