Selective Area Atomic Layer Deposited ZnO Nanodot on Self-Assembled Monolayer Pattern Using a Diblock Copolymer Nano-Template

2012 ◽  
Vol 12 (2) ◽  
pp. 1483-1486 ◽  
Author(s):  
Doyoung Kim ◽  
Jaehong Yoon ◽  
Hyungjun Kim
Keyword(s):  
Diblock Copolymer ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Selective Area ◽  
Self Assembled

Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces

2010 ◽  
Vol 518 (15) ◽  
pp. 4126-4130 ◽  
Author(s):  
Kibyung Park ◽  
Younghwan Lee ◽  
Kyung Taek Im ◽  
June Young Lee ◽  
Sangwoo Lim
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Characterizing Self-Assembled Monolayer Breakdown in Area-Selective Atomic Layer Deposition

Langmuir ◽  
2021 ◽  
Vol 37 (39) ◽  
pp. 11637-11645
Author(s):  
Tzu-Ling Liu ◽  
Li Zeng ◽  
Katie L. Nardi ◽  
Dennis M. Hausmann ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Passivation of copper surfaces for selective-area ALD using a thiol self-assembled monolayer

2012 ◽  
Vol 27 (7) ◽  
pp. 074004 ◽  
Author(s):  
Elina Färm ◽  
Marko Vehkamäki ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Self Assembled Monolayer ◽  
Copper Surfaces ◽  
Selective Area ◽  
Self Assembled

Self-assembled monolayer resist for atomic layer deposition of HfO2 and ZrO2 high-κ gate dielectrics

2004 ◽  
Vol 84 (20) ◽  
pp. 4017-4019 ◽  
Author(s):  
Rong Chen ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Gate Dielectrics ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Investigation of Self-Assembled Monolayer Resists for Hafnium Dioxide Atomic Layer Deposition

2005 ◽  
Vol 17 (3) ◽  
pp. 536-544 ◽  
Author(s):  
Rong Chen ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled
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