Comparison of Characteristics of Fluorine Doped Zinc and Gallium Tin Oxide Composite Thin Films Deposited on Stainless Steel 316 Bipolar Plate by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition for Proton Exchange Membrane Fuel Cells

Jihun Park; Chairul Hudaya; Joong Kee Lee

doi:10.1166/jnn.2011.5087

Comparison of Characteristics of Fluorine Doped Zinc and Gallium Tin Oxide Composite Thin Films Deposited on Stainless Steel 316 Bipolar Plate by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition for Proton Exchange Membrane Fuel Cells

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.5087 ◽

2011 ◽

Vol 11 (9) ◽

pp. 7999-8003

Author(s):

Jihun Park ◽

Chairul Hudaya ◽

Joong Kee Lee

Keyword(s):

Proton Exchange Membrane ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Bipolar Plate ◽

Proton Exchange ◽

Organic Chemical ◽

Metal Organic ◽

Stainless Steel 316 ◽

Exchange Membrane ◽

Organic Chemical Vapor Deposition

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Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO2 thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4943389 ◽

2016 ◽

Vol 34 (3) ◽

pp. 031501 ◽

Cited By ~ 2

Author(s):

Bup Ju Jeon ◽

Chairul Hudaya ◽

Joong Kee Lee

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Pilot Scale ◽

Organic Chemical ◽

Large Area ◽

Metal Organic ◽

Sno2 Thin Films ◽

Organic Chemical Vapor Deposition

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Characteristics of Tin Oxide Thin Films on a Poly Ethylene Terephthalate Substrate Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

New Developments and Application in Chemical Reaction Engineering - Studies in Surface Science and Catalysis ◽

10.1016/s0167-2991(06)81614-9 ◽

2006 ◽

pp. 385-388 ◽

Cited By ~ 1

Author(s):

Y. H Kook ◽

D. J Byun ◽

B. J Jeon ◽

J. K Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Poly Ethylene Terephthalate ◽

Metal Organic ◽

Poly Ethylene ◽

Organic Chemical Vapor Deposition

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Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580479 ◽

1997 ◽

Vol 15 (1) ◽

pp. 72-76 ◽

Cited By ~ 6

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Kyong Sub Kim ◽

Byoung Gon Yu ◽

Yon Ho Jeong ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma ◽

Mass Spectroscopic Study

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The effect of direct current bias on the characteristics of Cu/C:H composite thin films on poly ethylene terephthalate film prepared by electron cyclotron resonance–metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2005.09.095 ◽

2006 ◽

Vol 496 (2) ◽

pp. 395-401 ◽

Cited By ~ 7

Author(s):

Bup Ju Jeon ◽

Hyungduk Ko ◽

Jin Hyun ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Cyclotron Resonance ◽

Ethylene Terephthalate ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Poly Ethylene Terephthalate ◽

Direct Current Bias ◽

Metal Organic ◽

Poly Ethylene ◽

Organic Chemical Vapor Deposition

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Indium Nitride Film Growth by Metal Organic Chemical Vapor Deposition with Nitrogen Activation in Electron Cyclotron Resonance Discharge Sustained by 24 GHz Gyrotron Radiation

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.08jd07 ◽

2013 ◽

Vol 52 (8S) ◽

pp. 08JD07 ◽

Cited By ~ 1

Author(s):

Alexander Vodopyanov ◽

Dmitry Mansfeld ◽

Yurii Buzynin ◽

Mikhail Drozdov ◽

Yurii Drozdov ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Film Growth ◽

Indium Nitride ◽

Chemical Vapor ◽

Organic Chemical ◽

Nitride Film ◽

Nitrogen Activation ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Structural and Electrical Characteristics of Gallium Tin Oxide Thin Films Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.4840 ◽

2011 ◽

Vol 11 (8) ◽

pp. 7234-7237

Author(s):

Ji Hun Park ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Thin Films ◽

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Electrical Characteristics ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Fluorine doped gallium tin oxide composite films as transparent conductive oxides on polyethylene terephthalate film prepared by electron cyclotron resonance metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.04.048 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6863-6867 ◽

Cited By ~ 13

Author(s):

Ji Hun Park ◽

Samseok Jang ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Composite Films ◽

Chemical Vapor ◽

Organic Chemical ◽

Polyethylene Terephthalate Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.12.004 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3011-3020 ◽

Cited By ~ 17

Author(s):

S.A. Barve ◽

Jagannath ◽

N. Mithal ◽

M.N. Deo ◽

A. Biswas ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Evaporation Temperature ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

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Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Journal of Materials Science ◽

10.1007/s10853-008-2463-y ◽

2008 ◽

Vol 43 (10) ◽

pp. 3417-3423 ◽

Cited By ~ 11

Author(s):

J. H. Park ◽

D. Byun ◽

B. J. Jeon ◽

J. K. Lee

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Polyethylene Terephthalate Substrate ◽

Organic Chemical Vapor Deposition

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Enhancement of Ru Nucleation in Ru-Metal Organic Chemical Vapor Deposition by Electron Cyclotron Resonance Plasma Pretreatment

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.5539 ◽

2003 ◽

Vol 42 (Part 1, No. 9A) ◽

pp. 5539-5542 ◽

Cited By ~ 2

Author(s):

Kyunsuk Choi ◽

Jongmin Lim ◽

Sudipta Roy ◽

Chongmu Lee

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Plasma Pretreatment ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

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