Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Joon Sung Lee; Han Wook Song; Kyong Sub Kim; Byoung Gon Yu; Yon Ho Jeong; Zhong-Tao Jiang; Kwangsoo No

doi:10.1116/1.580479

Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580479 ◽

1997 ◽

Vol 15 (1) ◽

pp. 72-76 ◽

Cited By ~ 6

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Kyong Sub Kim ◽

Byoung Gon Yu ◽

Yon Ho Jeong ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma ◽

Mass Spectroscopic Study

Download Full-text

Enhancement of Ru Nucleation in Ru-Metal Organic Chemical Vapor Deposition by Electron Cyclotron Resonance Plasma Pretreatment

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.5539 ◽

2003 ◽

Vol 42 (Part 1, No. 9A) ◽

pp. 5539-5542 ◽

Cited By ~ 2

Author(s):

Kyunsuk Choi ◽

Jongmin Lim ◽

Sudipta Roy ◽

Chongmu Lee

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Plasma Pretreatment ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

Download Full-text

Effects of Sr/Ti Ratio on the Step Coverage of SrTiO3Thin Films Fabricated Using Electron Cyclotron Resonance Plasma Enhanced Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.2456 ◽

2001 ◽

Vol 40 (Part 1, No. 4A) ◽

pp. 2456-2459 ◽

Cited By ~ 2

Author(s):

Soon Yon Park ◽

Jongwan Choi ◽

Kwangsoo No

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

Download Full-text

Dependence of the properties of (SrxTi1−x)O3 thin films deposited by plasma-enhanced metal–organic chemical vapor deposition on electron cyclotron resonance plasma

Thin Solid Films ◽

10.1016/s0040-6090(97)00002-3 ◽

1997 ◽

Vol 301 (1-2) ◽

pp. 154-161 ◽

Cited By ~ 5

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Byung-Hyuk Jun ◽

Dong Hwa Kwack ◽

Byoung Gon Yu ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

Download Full-text

Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.12.004 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3011-3020 ◽

Cited By ~ 17

Author(s):

S.A. Barve ◽

Jagannath ◽

N. Mithal ◽

M.N. Deo ◽

A. Biswas ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Evaporation Temperature ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

Download Full-text

Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO2 thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4943389 ◽

2016 ◽

Vol 34 (3) ◽

pp. 031501 ◽

Cited By ~ 2

Author(s):

Bup Ju Jeon ◽

Chairul Hudaya ◽

Joong Kee Lee

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Pilot Scale ◽

Organic Chemical ◽

Large Area ◽

Metal Organic ◽

Sno2 Thin Films ◽

Organic Chemical Vapor Deposition

Download Full-text

Characteristics of Tin Oxide Thin Films on a Poly Ethylene Terephthalate Substrate Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

New Developments and Application in Chemical Reaction Engineering - Studies in Surface Science and Catalysis ◽

10.1016/s0167-2991(06)81614-9 ◽

2006 ◽

pp. 385-388 ◽

Cited By ~ 1

Author(s):

Y. H Kook ◽

D. J Byun ◽

B. J Jeon ◽

J. K Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Poly Ethylene Terephthalate ◽

Metal Organic ◽

Poly Ethylene ◽

Organic Chemical Vapor Deposition

Download Full-text

Structural and Electrical Characteristics of Gallium Tin Oxide Thin Films Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.4840 ◽

2011 ◽

Vol 11 (8) ◽

pp. 7234-7237

Author(s):

Ji Hun Park ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Thin Films ◽

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Electrical Characteristics ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Fluorine doped gallium tin oxide composite films as transparent conductive oxides on polyethylene terephthalate film prepared by electron cyclotron resonance metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.04.048 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6863-6867 ◽

Cited By ~ 13

Author(s):

Ji Hun Park ◽

Samseok Jang ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Composite Films ◽

Chemical Vapor ◽

Organic Chemical ◽

Polyethylene Terephthalate Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Journal of Materials Science ◽

10.1007/s10853-008-2463-y ◽

2008 ◽

Vol 43 (10) ◽

pp. 3417-3423 ◽

Cited By ~ 11

Author(s):

J. H. Park ◽

D. Byun ◽

B. J. Jeon ◽

J. K. Lee

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Polyethylene Terephthalate Substrate ◽

Organic Chemical Vapor Deposition

Download Full-text

Adhesion characteristics of copper thin film deposited on PET substrate by electron cyclotron resonance–metal organic chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.015 ◽

2008 ◽

Vol 202 (9) ◽

pp. 1839-1846 ◽

Cited By ~ 13

Author(s):

Bup Ju Jeon ◽

Sangwha Lee ◽

Joong Kee Lee

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Copper Thin Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Pet Substrate

Download Full-text