Textured Tetragonal ZrO2 Film Grown on (100) Silicon Surface by DLI Metal-Organic Chemical Vapor Deposition
2011 ◽
Vol 11
(9)
◽
pp. 8009-8016
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2000 ◽
Vol 7
(1)
◽
pp. 12
2021 ◽
Vol 15
(6)
◽
pp. 2170024
2004 ◽
Vol 110
(1)
◽
pp. 34-37
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2010 ◽
Vol 49
(4)
◽
pp. 04DL19
◽
2011 ◽
Vol 58
(5)
◽
pp. 1447-1451
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