In-Situ Monitoring of Pattern Filling in Nano-Imprint Lithography Using Surface Plasmon Resonance

Hong Hocheng; Wei-Hsuan Hsu; Jow-Tsong Shy

doi:10.1166/jnn.2011.3780

In-Situ Monitoring of Pattern Filling in Nano-Imprint Lithography Using Surface Plasmon Resonance

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.3780 ◽

2011 ◽

Vol 11 (6) ◽

pp. 5279-5284 ◽

Cited By ~ 2

Author(s):

Hong Hocheng ◽

Wei-Hsuan Hsu ◽

Jow-Tsong Shy

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

In Situ Monitoring ◽

Imprint Lithography ◽

Nano Imprint

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A novel detection method used to avoid the effect of mould damage on the performance of surface plasmon resonance measurement for measuring the residual layer thickness in nano-imprint lithography

International Journal of Surface Science and Engineering ◽

10.1504/ijsurfse.2015.068240 ◽

2015 ◽

Vol 9 (2/3) ◽

pp. 201

Author(s):

Wei an Hsu

Keyword(s):

Surface Plasmon Resonance ◽

Layer Thickness ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Detection Method ◽

Residual Layer ◽

Imprint Lithography ◽

Resonance Measurement ◽

Nano Imprint

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Surface plasmon resonance fiber sensor for in situ monitoring of the deposition of nm-scale polymer films

10.1117/12.835144 ◽

2009 ◽

Cited By ~ 1

Author(s):

Y. Shevchenko ◽

N. U. Ahamad ◽

G. Galway ◽

A. Ianoul ◽

J. Albert

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Polymer Films ◽

Plasmon Resonance ◽

In Situ Monitoring ◽

Fiber Sensor

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Simultaneous Surface Plasmon Resonance/Fluorescence Spectroelectrochemical in Situ Monitoring of Dynamic Changes on Functional Interfaces: A Study of the Electrochemical Proximity Assay Model System

ACS Applied Materials & Interfaces ◽

10.1021/acsami.8b13993 ◽

2018 ◽

Vol 10 (48) ◽

pp. 41763-41772 ◽

Cited By ~ 2

Author(s):

Lang Zhou ◽

Mary A. Arugula ◽

Bryan A. Chin ◽

Aleksandr L. Simonian

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Model System ◽

In Situ Monitoring ◽

Resonance Fluorescence ◽

Dynamic Changes

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Notice of Retraction: Surface Plasmon Resonance Detection of Saxitoxin: An Alternative to In-Situ Monitoring Red-Tide Toxins

2011 Third Pacific-Asia Conference on Circuits, Communications and System (PACCS) ◽

10.1109/paccs.2011.5990278 ◽

2011 ◽

Author(s):

Ji Li ◽

Yong J. Yuan

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Red Tide ◽

In Situ Monitoring ◽

Resonance Detection

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An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films

Sensors ◽

10.3390/s130709513 ◽

2013 ◽

Vol 13 (7) ◽

pp. 9513-9521 ◽

Cited By ~ 2

Author(s):

Yu-Chia Tsao ◽

Woo-Hu Tsai ◽

Wen-Ching Shih ◽

Mu-Shiang Wu

Keyword(s):

Thin Films ◽

Surface Plasmon Resonance ◽

Optical Fiber ◽

Real Time ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Optical Fiber Sensor ◽

Fiber Sensor ◽

Tio2 Thin Films

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Supersensitive detection of T-2 toxin by the in situ synthesized π-conjugated molecularly imprinted nanopatterns. An in situ investigation by surface plasmon resonance combined with electrochemistry

Biosensors and Bioelectronics ◽

10.1016/j.bios.2010.10.050 ◽

2011 ◽

Vol 26 (5) ◽

pp. 2534-2540 ◽

Cited By ~ 30

Author(s):

Garima Gupta ◽

A.S.B. Bhaskar ◽

B.K. Tripathi ◽

P. Pandey ◽

M. Boopathi ◽

...

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Molecularly Imprinted ◽

In Situ Investigation

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Wide-Field Surface Plasmon Resonance Microscopy for In-Situ Characterization of Nanoparticle Suspensions

In-situ Characterization Techniques for Nanomaterials ◽

10.1007/978-3-662-56322-9_3 ◽

2018 ◽

pp. 61-105 ◽

Cited By ~ 1

Author(s):

Shavkat Nizamov ◽

Vladimir M. Mirsky

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Wide Field ◽

In Situ Characterization ◽

Nanoparticle Suspensions ◽

Surface Plasmon Resonance Microscopy

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In situ template generation of silver nanoparticles as amplification tags for ultrasensitive surface plasmon resonance biosensing of microRNA

Biosensors and Bioelectronics ◽

10.1016/j.bios.2019.05.006 ◽

2019 ◽

Vol 137 ◽

pp. 82-87 ◽

Cited By ~ 12

Author(s):

Xin Wang ◽

Ting Hou ◽

Haiyang Lin ◽

Wenxin Lv ◽

Haiyin Li ◽

...

Keyword(s):

Silver Nanoparticles ◽

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance

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An in situ SERS study of plasmonic nanochemistry based on bifunctional “hedgehog-like” arrays

Nanoscale ◽

10.1039/c9nr01297d ◽

2019 ◽

Vol 11 (19) ◽

pp. 9422-9428 ◽

Cited By ~ 5

Author(s):

Yuduo Guan ◽

Zengyao Wang ◽

Panpan Gu ◽

Yu Wang ◽

Wei Zhang ◽

...

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Strong Surface

An in situ SERS study of plasmonic nanochemistry is realized on hierarchical Ag “hedgehog-like” arrays with strong surface plasmon resonance.

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In Situ Kinetics of Self-Assembly by Surface Plasmon Resonance Spectroscopy

Langmuir ◽

10.1021/la9508452 ◽

1996 ◽

Vol 12 (20) ◽

pp. 4731-4740 ◽

Cited By ~ 272

Author(s):

Kevin A. Peterlinz ◽

R. Georgiadis

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Self Assembly ◽

Resonance Spectroscopy ◽

Surface Plasmon Resonance Spectroscopy ◽

Kinetics Of

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