scholarly journals Electrical Properties of Titanium Nitride Thin Films Deposited by Reactive Sputtering

1981 ◽  
Vol 8 (3-4) ◽  
pp. 249-249 ◽  
Author(s):  
K. Kawabata ◽  
T. Muto
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Titanium Nitride ◽  
Reactive Sputtering

Structural, morphological and electrical properties of nickel oxide thin films deposited by reactive sputtering

2015 ◽  
Vol 357 ◽  
pp. 838-844 ◽  
Author(s):  
J. Keraudy ◽  
J. García Molleja ◽  
A. Ferrec ◽  
B. Corraze ◽  
M. Richard-Plouet ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Nickel Oxide ◽  
Reactive Sputtering ◽  
Oxide Thin Films ◽  
Nickel Oxide Thin Films

Formation of hydrated yttrium oxide and titanium oxide thin films by reactive sputtering in H2O atmosphere and their electrical properties

2014 ◽  
Vol 53 (6) ◽  
pp. 068002 ◽  
Author(s):  
Yoshio Abe ◽  
Ning Li ◽  
Kosuke Nishimoto ◽  
Midori Kawamura ◽  
Kyung Ho Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Titanium Oxide ◽  
Yttrium Oxide ◽  
Reactive Sputtering ◽  
Oxide Thin Films
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