scholarly journals Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Shang-Chou Chang ◽  
Tien-Chai Lin ◽  
To-Sing Li
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Thermal Effect ◽  
Thermal Desorption ◽  
Thermal Desorption Spectroscopy ◽  
Optical Transmittance ◽  
Device Fabrication ◽  
Electrical And Optical Properties ◽  
Different Temperatures ◽  
Aluminum Doped Zinc Oxide

This work investigates the thermal effect on the structural, electrical, and optical properties of aluminum doped zinc oxide (AZO) films. The AZO films deposited at different temperatures were measured using a thermal desorption system to obtain their corresponding thermal desorption spectroscopy (TDS). In addition to obtaining information of thermal desorption, the measurement of TDS also has the effect of vacuum annealing on the AZO films. The results of measuring TDS imply part of the doped aluminum atoms do not stay at substituted zinc sites in AZO films. The (002) preferential direction of the AZO films in X-ray diffraction spectra shifts to a lower angle after measurement of TDS. The grain size grows and surface becomes denser for all AZO films after measurement of TDS. The carrier concentration, mobility, and average optical transmittance increase while the electrical resistivity decreases for AZO films after measurement of TDS. These results indicate that the AZO films deposited at 200°C are appropriate selections if the AZO films are applied in device fabrication of heat-produced process.

scholarly journals Enhanced Sol–Gel Route to Obtain a Highly Transparent and Conductive Aluminum-Doped Zinc Oxide Thin Film

Materials ◽  
2019 ◽  
Vol 12 (11) ◽  
pp. 1744 ◽  
Author(s):  
Mohammad Hossein Nateq ◽  
Riccardo Ceccato
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Sol Gel ◽  
Nir Spectroscopy ◽  
Optical Transmittance ◽  
Oxide Thin Film ◽  
Dta Analysis ◽  
Grain Boundary Characteristics ◽  
Aluminum Doped Zinc Oxide ◽  
Boundary Characteristics

The electrical and optical properties of sol–gel derived aluminum-doped zinc oxide thin films containing 2 at.% Al were investigated considering the modifying effects of (1) increasing the sol H2O content and (2) a thermal treatment procedure with a high-temperature approach followed by an additional heat-treatment step under a reducing atmosphere. According to the results obtained via the TG-DTA analysis, FT-IR spectroscopy, X-ray diffraction technique, and four-point probe resistivity measurements, it is argued that in the modified sample, the sol hydrolysis, decomposition of the deposited gel, and crystallization of grains result in grains of larger crystallite size in the range of 20 to 30 nm and a stronger c-axis preferred orientation with slightly less microstrain. The obtained morphology and grain-boundary characteristics result in improved conductivity considering the resistivity value below 6 mΩ·cm. A detailed investigation of the samples’ optical properties, in terms of analyzing their absorption and dispersion behaviors through UV-Vis-NIR spectroscopy, support our reasoning for the increase of the mobility, and to a lesser extent the concentration of charge carriers, while causing only a slight degradation of optical transmittance down to nearly 80%. Hence, an enhanced performance as a transparent conducting film is claimed for the modified sample by comparing the figure-of-merit values.

Structural, Electrical and Optical Properties of Aluminum-Doped Zinc Oxide Deposited on Glass and Polyimide by RF Magnetron Sputtering Method

2012 ◽  
Vol 49 (4) ◽  
pp. 043102
Author(s):  
王小锦 Wang Xiaojin ◽  
曾祥斌 Zeng Xiangbin ◽  
黄迪秋 Huang Diqiu ◽  
张笑 Zhang Xiao ◽  
李青 Li Qing
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Electrical And Optical Properties ◽  
Aluminum Doped Zinc Oxide
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