Growth and Device Performance of AlGaN/GaN Heterostructure with AlSiC Precoverage on Silicon Substrate
Keyword(s):
A crack-free AlGaN/GaN heterostructure was grown on 4-inch Si (111) substrate with initial dot-like AlSiC precoverage layer. It is believed that introducing the AlSiC layer between AlN wetting layer and Si substrate is more effective in obtaining a compressively stressed film growth than conventional Al precoverage on Si surface. The metal semiconductor field effect transistor (MESFET), fabricated on the AlGaN/GaN heterostructure grown with the AlSiC layer, exhibited normally on characteristics, such as threshold voltage of −2.3 V, maximum drain current of 370 mA/mm, and transconductance of 124 mS/mm.
2008 ◽
Vol 47
(4)
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pp. 2103-2107
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2015 ◽
Vol 4
(9)
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pp. M69-M72
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Keyword(s):
2020 ◽
Vol 10
(2)
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pp. 157-165
2009 ◽
Vol 48
(6)
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pp. 064503
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2021 ◽