scholarly journals MEMS-Reconfigurable Metamaterials and Antenna Applications

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Tomislav Debogovic ◽  
Julien Perruisseau-Carrier
Keyword(s):  
Transmission Lines ◽  
Microelectromechanical Systems ◽  
State Of The Art ◽  
Dynamic Control ◽  
Phase Shifters ◽  
Velocity Variation ◽  
Low Loss ◽  
Leaky Wave ◽  
Left Handed ◽  
Mems Technology

This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS) technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs) having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA). Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS) antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Low Cost ◽  
Impedance Matching ◽  
Phase Shifters ◽  
Rf Systems ◽  
Mems Technology ◽  
And Performance ◽  
Rf Performance

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.

MEMS-Enabled Smart Beam-Steering Antennas

2014 ◽  
pp. 183-203
Author(s):  
Hadi Mirzajani ◽  
Habib Badri Ghavifekr ◽  
Esmaeil Najafi Aghdam
Keyword(s):  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Beam Steering ◽  
Smart Antennas ◽  
Phase Shifters ◽  
Rapid Rate ◽  
Mems Devices ◽  
Batch Fabrication ◽  
Mems Technology ◽  
Smart Beam

In recent years, Microelectromechanical Systems (MEMS) technology has seen a rapid rate of evolution because of its great potential for advancing new products in a broad range of applications. The RF and microwave devices and components fabricated by this technology offer unsurpassed performance such as near-zero power consumption, high linearity, and cost effectiveness by batch fabrication in respect to their conventional counterparts. This chapter aims to give an in-depth overview of the most recently published methods of designing MEMS-based smart antennas. Before embarking into the different techniques of beam steering, the concept of smart antennas is introduced. Then, some fundamental concepts of MEMS technology such as micromachining technologies (bulk and surface micromachining) are briefly discussed. After that, a number of RF MEMS devices such as switches and phase shifters that have applications in beam steering antennas are introduced and their operating principals are completely explained. Finally, various configurations of MEMS-enabled beam steering antennas are discussed in detail.

scholarly journals RF-MEMS switches with AlN dielectric and their applications

2011 ◽  
Vol 3 (5) ◽  
pp. 509-520 ◽  
Author(s):  
Montserrat Fernández-Bolaños Badía ◽  
Pierre Nicole ◽  
Adrian Mihai Ionescu
Keyword(s):  
Transmission Lines ◽  
Rf Mems ◽  
Beam Steering ◽  
Phase Shifters ◽  
Center Frequency ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Mems Technology ◽  
Bandwidth Tuning ◽  
Rf Performance

This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickel-suspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.

Electronically controlled phase shifters based on right/left-handed transmission lines

2005 ◽  
Author(s):  
O.G. Vendik ◽  
L.B. Vendik ◽  
D.V. Kholodnyak ◽  
S.P. Zubko ◽  
E.V. Serebryakova
Keyword(s):  
Transmission Lines ◽  
Phase Shifters ◽  
Left Handed

Design and Characterization of Novel Millimeter-Wave MEMS CPW Transmission Lines

2011 ◽  
Vol 204-210 ◽  
pp. 577-582
Author(s):  
Jian Ming Huang ◽  
Y. L. Zhou ◽  
H. Guo
Keyword(s):  
Transmission Lines ◽  
Microelectromechanical Systems ◽  
Coplanar Waveguide ◽  
Characteristic Impedance ◽  
Effective Permittivity ◽  
Phase Shifters ◽  
Mapping Technique ◽  
60 Ghz ◽  
Loss Reduction ◽  
Propagation Properties

The design and development of novel microelectromechanical systems’ (MEMS) coplanar waveguide (CPW) transmission lines, using microshield and groove, are presented in the paper to operate between 5–60 GHz. The quasi-static capacitances of CPW are calculated using the conformal mapping technique to express the propagation properties, i.e., the characteristic impedance and effective permittivity. Simulation results have shown a considerable loss reduction to levels that compare favorably with the conventional CPW. These transmission lines can be widely used in the development of phase shifters, filters, and antennas, because of their advantages in loss reduction and improvement in the performance.

Prototyping With SUMMiT™ Technology, Sandia’s Ultra-Planar Multi-Level MEMS Technology

2002 ◽  
Author(s):  
Ellen Shepherd
Keyword(s):  
Chemical Mechanical Polishing ◽  
Microelectromechanical Systems ◽  
State Of The Art ◽  
Technology Process ◽  
Military Applications ◽  
Mems Technology ◽  
Volume Production ◽  
Visualization Tools ◽  
Multi Level ◽  
And Training

Sandia National Laboratories, a world leader in the development and application of surface micromachining technology, offers its ultra-planar, multi-level SUMMiT™ technology for prototyping devices for microelectromechanical systems (MEMS). By incorporating advanced fabrication processes, such as chemical mechanical polishing and five levels of polysilicon (four mechanical and one ground), in a well-characterized, base-lined technology, the SUMMiT™ (Sandia’s Ultra-planar, Multi-level, MEMS Technology) process offers a virtually limitless range of microelectromechanical systems that can be fabricated for both commercial and military applications [1]. Sandia’s SUMMiT™ process, licensed to industry for volume production, is available from Sandia for agile prototyping through the SAMPLES™ Program. The SAMPLES™ (Sandia’s Agile MEMS Prototyping, Layout tools, Education, and Services) Program, offers participants the opportunity to access state-of-the-art MEMS technology to prototype an idea and produce hardware that can be used to sell a concept. The four components of the SAMPLES™ Program provide: • Education and training on Sandia’s SUMMiT™ designand visualization tools, fabrication process, and reliability issues; • Layout tools for design including visualization and checking of design rules; • Fabrication in the 5-level SUMMiT™ technology; • Post-fabrication services such as release, packaging, reliability characterization, and failure analysis. This paper discusses the SUMMiT™ technology, its capabilities, and the infrastructure for prototyping within the technology through the SAMPLES™ Program.

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