Prototyping With SUMMiT™ Technology, Sandia’s Ultra-Planar Multi-Level MEMS Technology

2002 ◽  
Author(s):  
Ellen Shepherd
Keyword(s):  
Chemical Mechanical Polishing ◽  
Microelectromechanical Systems ◽  
State Of The Art ◽  
Technology Process ◽  
Military Applications ◽  
Mems Technology ◽  
Volume Production ◽  
Visualization Tools ◽  
Multi Level ◽  
And Training

Sandia National Laboratories, a world leader in the development and application of surface micromachining technology, offers its ultra-planar, multi-level SUMMiT™ technology for prototyping devices for microelectromechanical systems (MEMS). By incorporating advanced fabrication processes, such as chemical mechanical polishing and five levels of polysilicon (four mechanical and one ground), in a well-characterized, base-lined technology, the SUMMiT™ (Sandia’s Ultra-planar, Multi-level, MEMS Technology) process offers a virtually limitless range of microelectromechanical systems that can be fabricated for both commercial and military applications [1]. Sandia’s SUMMiT™ process, licensed to industry for volume production, is available from Sandia for agile prototyping through the SAMPLES™ Program. The SAMPLES™ (Sandia’s Agile MEMS Prototyping, Layout tools, Education, and Services) Program, offers participants the opportunity to access state-of-the-art MEMS technology to prototype an idea and produce hardware that can be used to sell a concept. The four components of the SAMPLES™ Program provide: • Education and training on Sandia’s SUMMiT™ designand visualization tools, fabrication process, and reliability issues; • Layout tools for design including visualization and checking of design rules; • Fabrication in the 5-level SUMMiT™ technology; • Post-fabrication services such as release, packaging, reliability characterization, and failure analysis. This paper discusses the SUMMiT™ technology, its capabilities, and the infrastructure for prototyping within the technology through the SAMPLES™ Program.

scholarly journals MEMS-Reconfigurable Metamaterials and Antenna Applications

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Tomislav Debogovic ◽  
Julien Perruisseau-Carrier
Keyword(s):  
Transmission Lines ◽  
Microelectromechanical Systems ◽  
State Of The Art ◽  
Dynamic Control ◽  
Phase Shifters ◽  
Velocity Variation ◽  
Low Loss ◽  
Leaky Wave ◽  
Left Handed ◽  
Mems Technology

This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS) technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs) having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA). Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS) antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

Integrated MEMS Technologies

MRS Bulletin ◽  
2001 ◽  
Vol 26 (4) ◽  
pp. 291-295 ◽  
Author(s):  
Andrea E. Franke ◽  
Tsu-Jae King ◽  
Roger T. Howe
Keyword(s):  
Microelectromechanical Systems ◽  
Inertial Sensors ◽  
State Of The Art ◽  
Mems Devices ◽  
Sensors And Actuators ◽  
Component Level ◽  
Substantial Impact ◽  
The Past ◽  
Current State ◽  
Mems Technology

While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing electronics are still beyond the current state of the art. There are several incentives to co-fabricate MEMS devices and electronics on a single silicon chip, which apply to applications such as inertial sensors.

scholarly journals Contextualized Filtering for Shared Cyber Threat Information

Sensors ◽  
2021 ◽  
Vol 21 (14) ◽  
pp. 4890
Author(s):  
Athanasios Dimitriadis ◽  
Christos Prassas ◽  
Jose Luis Flores ◽  
Boonserm Kulvatunyou ◽  
Nenad Ivezic ◽  
...  
Keyword(s):  
Information Sharing ◽  
Business Processes ◽  
State Of The Art ◽  
Contextual Information ◽  
Coarse Grained ◽  
Business Information ◽  
Cyber Threat ◽  
Domain Expertise ◽  
Multi Level ◽  
Filtering Approach

Cyber threat information sharing is an imperative process towards achieving collaborative security, but it poses several challenges. One crucial challenge is the plethora of shared threat information. Therefore, there is a need to advance filtering of such information. While the state-of-the-art in filtering relies primarily on keyword- and domain-based searching, these approaches require sizable human involvement and rarely available domain expertise. Recent research revealed the need for harvesting of business information to fill the gap in filtering, albeit it resulted in providing coarse-grained filtering based on the utilization of such information. This paper presents a novel contextualized filtering approach that exploits standardized and multi-level contextual information of business processes. The contextual information describes the conditions under which a given threat information is actionable from an organization perspective. Therefore, it can automate filtering by measuring the equivalence between the context of the shared threat information and the context of the consuming organization. The paper directly contributes to filtering challenge and indirectly to automated customized threat information sharing. Moreover, the paper proposes the architecture of a cyber threat information sharing ecosystem that operates according to the proposed filtering approach and defines the characteristics that are advantageous to filtering approaches. Implementation of the proposed approach can support compliance with the Special Publication 800-150 of the National Institute of Standards and Technology.

scholarly journals An Efficient and General Framework for Aerial Point Cloud Classification in Urban Scenarios

2021 ◽  
Vol 13 (10) ◽  
pp. 1985
Author(s):  
Emre Özdemir ◽  
Fabio Remondino ◽  
Alessandro Golkar
Keyword(s):  
Point Cloud ◽  
State Of The Art ◽  
Computational Power ◽  
Specific Data ◽  
Cloud Processing ◽  
Point Cloud Processing ◽  
Current State ◽  
Data Source ◽  
Point Cloud Classification ◽  
And Training

With recent advances in technologies, deep learning is being applied more and more to different tasks. In particular, point cloud processing and classification have been studied for a while now, with various methods developed. Some of the available classification approaches are based on specific data source, like LiDAR, while others are focused on specific scenarios, like indoor. A general major issue is the computational efficiency (in terms of power consumption, memory requirement, and training/inference time). In this study, we propose an efficient framework (named TONIC) that can work with any kind of aerial data source (LiDAR or photogrammetry) and does not require high computational power while achieving accuracy on par with the current state of the art methods. We also test our framework for its generalization ability, showing capabilities to learn from one dataset and predict on unseen aerial scenarios.

Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology

2006 ◽  
Vol 220 (9) ◽  
pp. 1481-1487 ◽  
Author(s):  
J-B Li ◽  
K Jiang ◽  
G J Davies
Keyword(s):  
Microelectromechanical Systems ◽  
Machining Process ◽  
Metallic Surface ◽  
Manufacturing Cost ◽  
Sem Images ◽  
Deep Reactive Ion Etching ◽  
Electro Discharge Machining ◽  
Mems Technology ◽  
Fabrication Condition ◽  
Edm Process

A novel die-sinking micro-electro discharge machining (EDM) process is presented for volume fabrication of metallic microcomponents. In the process, a high-precision silicon electrode is fabricated using deep reactive ion etching (DRIE) process of microelectromechanical systems (MEMS) technology and then coated with a thin layer of copper to increase the conductivity. The metalized Si electrode is used in the EDM process to manufacture metallic microcomponents by imprinting the electrode onto a flat metallic surface. The two main advantages of this process are that it enables the fabrication of metallic microdevices and reduces manufacturing cost and time. The development of the new EDM process is described. A silicon component was produced using the Surface Technology Systems plasma etcher and the DRIE process. Such components can be manufactured with a precision in nanometres. The minimum feature of the component is 50 μm. In the experiments, the Si component was coated with copper and then used as the electrode on an EDM machine of 1 μm resolution. In the manufacturing process, 130 V and 0.2 A currents were used for a period of 5 min. The SEM images of the resulting device show clear etched areas, and the electric discharge wave chart indicates a good fabrication condition. The experimental results have been analysed and the new micro-EDM process is found to be able to fabricate 25 μm features.

Body and health in the training of health professionals: a mapping of scientific production

2021 ◽  
Vol 2 (1) ◽  
Author(s):  
Márcia Cristina Rocha Paranhos ◽  
Lívia De Rezende Cardoso
Keyword(s):  
Health Professionals ◽  
Professional Training ◽  
State Of The Art ◽  
National Curriculum ◽  
Health Curriculum ◽  
Academic Production ◽  
Unified Health System ◽  
Curriculum Guidelines ◽  
Theses And Dissertations ◽  
And Training

This article builds a mapping in order to analyze the theses and dissertations about body, health, curriculum and training of health professionals. For this, theses and dissertations were mapped in the period from 2010 to 2020 through a state-of-the-art study. The composition of the data is given by the presentation and discussion of the listed texts. As for research, these concern the production of bodies based on biotechnological discourses; professional training in health; others point to the curricula of health courses after the National Curriculum Guidelines (DCN); the performance of health professionals in relation to the Unified Health System (SUS); teaching strategies for health training; corporeidity in the curricula, especially in the curricula of the Physical Education course; the anatomoclinical body and educational health practices. In this perspective, some contributions, limits and possibilities of this academic production were observed.

New Hybrid Methodology for the Development of MEMS Multivariable Sensors

2001 ◽  
Author(s):  
Emily J. Pryputniewicz ◽  
John P. Angelosanto ◽  
Gordon C. Brown ◽  
Cosme Furlong ◽  
Ryszard J. Pryputniewicz
Keyword(s):  
Process Control ◽  
Microelectromechanical Systems ◽  
Absolute Pressure ◽  
Single Chip ◽  
Specific Test ◽  
Mems Sensor ◽  
Test Conditions ◽  
Mems Technology ◽  
Functional Operation ◽  
Hybrid Methodology

Abstract Using recent advances in microelectromechanical systems (MEMS) technology, a new multivariable sensor was developed. This MEMS sensor, capable of measuring temperature, absolute pressure, and differential pressure on a single chip, is particularly suitable for applications in process control industry. However, functional operation of the sensor depends on validation of its performance under specific test conditions. We have developed a hybrid methodology, based on analysis and measurements, that allows such validation. In this paper, the MEMS multivariable sensor is described, the hybrid methodology is outlined, and its use is illustrated with representative results.

scholarly journals Using a virtual machine environment for developing, testing, and training for the UM-UKCA composition-climate model, using Unified Model version 10.9 and above

2018 ◽  
Vol 11 (9) ◽  
pp. 3647-3657 ◽  
Author(s):  
Nathan Luke Abraham ◽  
Alexander T. Archibald ◽  
Paul Cresswell ◽  
Sam Cusworth ◽  
Mohit Dalvi ◽  
...  
Keyword(s):  
Virtual Machine ◽  
Climate Model ◽  
State Of The Art ◽  
Model Development ◽  
Unified Model ◽  
Model Version ◽  
Weather And Climate ◽  
Interactive Composition ◽  
Comprehensive Test ◽  
And Training

Abstract. The Met Office Unified Model (UM) is a state-of-the-art weather and climate model that is used operationally worldwide. UKCA is the chemistry and aerosol sub model of the UM that enables interactive composition and physical atmosphere interactions, but which adds an additional 120 000 lines of code to the model. Ensuring that the UM code and UM-UKCA (the UM running with interactive chemistry and aerosols) is well tested is thus essential. While a comprehensive test harness is in place at the Met Office and partner sites to aid in development, this is not available to many UM users. Recently, the Met Office have made available a virtual machine environment that can be used to run the UM on a desktop or laptop PC. Here we describe the development of a UM-UKCA configuration that is able to run within this virtual machine while only needing 6 GB of memory, before discussing the applications of this system for model development, testing, and training.

RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Low Cost ◽  
Impedance Matching ◽  
Phase Shifters ◽  
Rf Systems ◽  
Mems Technology ◽  
And Performance ◽  
Rf Performance

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.

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