On MEMS Reliability and Failure Mechanisms
2011 ◽
Vol 2011
◽
pp. 1-7
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Keyword(s):
Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.
Keyword(s):
2016 ◽
Vol 374
(2071)
◽
pp. 20150280
◽
2011 ◽
Vol 80-81
◽
pp. 850-854
Keyword(s):
2021 ◽
2016 ◽
Vol 5
(1)
◽
pp. 81-90
◽
Keyword(s):