D061 Strain Relaxation Calculations and Error Analysis: High Resolution X-ray Diffraction Reciprocal Space Maps

2003 ◽  
Vol 18 (2) ◽  
pp. 178-178
Author(s):  
E. D. Meserole ◽  
A. M. Noori ◽  
M. S. Goorsky
Keyword(s):  
High Resolution ◽  
Error Analysis ◽  
Strain Relaxation ◽  
Reciprocal Space ◽  
X Ray Diffraction ◽  
X Ray

scholarly journals High-resolution X-ray diffraction analysis of strain relaxation in epitaxial oxide thin films

2008 ◽  
Vol 64 (a1) ◽  
pp. C106-C106
Author(s):  
R. Guinebretiere ◽  
F. Conchon ◽  
A. Boulle ◽  
C. Girardot ◽  
S. Pignard ◽  
...  
Keyword(s):  
Thin Films ◽  
High Resolution ◽  
Diffraction Analysis ◽  
Strain Relaxation ◽  
X Ray Diffraction ◽  
Oxide Thin Films ◽  
X Ray ◽  
Epitaxial Oxide

Observation of strain relaxation phenomena in buried and nonburied III–V surface gratings through high resolution x-ray diffraction

1997 ◽  
Vol 71 (22) ◽  
pp. 3227-3229 ◽  
Author(s):  
L. Leprince ◽  
G. T. Baumbach ◽  
A. Talneau ◽  
M. Gailhanou ◽  
J. Schneck
Keyword(s):  
High Resolution ◽  
Strain Relaxation ◽  
Relaxation Phenomena ◽  
X Ray Diffraction ◽  
X Ray

High-Resolution X-Ray Diffraction Measurements of SiGe/Si Structures

1994 ◽  
Vol 375 ◽  
Author(s):  
J. L. Jordan-Sweet ◽  
P. M. Mooney ◽  
G. B. Stephenson
Keyword(s):  
High Resolution ◽  
Alloy Composition ◽  
Strain Relaxation ◽  
Grazing Incidence ◽  
Diffraction Peak ◽  
Thin Layers ◽  
High Flux ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grazing Incidence Diffraction

AbstractHigh-resolution x-ray diffraction is an excellent probe of strain relaxation in complex SiGe structures. The high flux provided by synchrotron sources enables us to make extensive reciprocal space map measurements and evaluate many samples. The diffraction peak positions of each layer in a step-graded structure, measured for two different reflections, yield quantitative values for the relaxation and alloy composition in the layer. Grazing-incidence diffraction allows us to determine the in-plane structure of very thin layers, which have thickness-broadened peaks at conventional diffraction geometries. We demonstrate the power of these techniques with two examples.

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