Room Temperature Photoluminescence and Raman Characterization of Interface Characteristics of SiN/SiO2/Si Prepared under Various Deposition Techniques and Conditions
2015 ◽
Vol 4
(7)
◽
pp. N76-N82
◽
2012 ◽
Vol 1
(6)
◽
pp. P297-P302
◽
1982 ◽
Vol 21
(Part 1, No. 5)
◽
pp. 712-715
◽
Keyword(s):