Improved Etch Characteristics of Magnetic Tunneling Junction Materials by Using Helium
2017 ◽
Vol 6
(9)
◽
pp. N148-N154
◽
2017 ◽
Vol 64
(12)
◽
pp. 4919-4927
◽
2014 ◽
Vol 707
◽
pp. 338-342
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