Atomic Layer Deposition of Titanium Oxide for Pseudocapacitive Functionalization of Vertically-Aligned Carbon Nanotube Supercapacitor Electrodes

2014 ◽  
Vol 4 (2) ◽  
pp. M1-M5 ◽  
Author(s):  
Robert A. Fisher ◽  
Morgan R. Watt ◽  
Ravi Konjeti ◽  
W. Jud Ready
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Vertically Aligned

scholarly journals Atomic Layer Deposition of Inorganic Films for the Synthesis of Vertically Aligned Carbon Nanotube Arrays and Their Hybrids

Coatings ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 806
Author(s):  
Guang-Jie Yuan ◽  
Jie-Fei Xie ◽  
Hao-Hao Li ◽  
Hong-Liang Lu ◽  
Ying-Zhong Tian
Keyword(s):  
Thin Films ◽  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Atomic Scale ◽  
Nanotube Arrays ◽  
Aspect Ratios ◽  
Carbon Nanotube Arrays ◽  
Layer Deposition ◽  
Vertically Aligned

Vertically aligned carbon nanotube arrays (VACNTs) have many excellent properties and show great potential for various applications. Recently, there has been a desire to grow VACNTs on nonplanar surfaces and synthesize core-sheath-structured VACNT–inorganic hybrids. To achieve this aim, atomic layer deposition (ALD) has been extensively applied, especially due to its atomic-scale thickness controllability and excellent conformality of films on three-dimensional (3D) structures with high aspect ratios. In this paper, the ALD of catalyst thin films for the growth of VACNTs, such as Co3O4, Al2O3, and Fe2O3, was first mentioned. After that, the ALD of thin films for the synthesis of VACNT–inorganic hybrids was also discussed. To highlight the importance of these hybrids, their potential applications in supercapacitors, solar cells, fuel cells, and sensors have also been reviewed.

Conformal Atomic Layer Deposition of Alumina on Millimeter Tall, Vertically-Aligned Carbon Nanotube Arrays

2014 ◽  
Vol 6 (21) ◽  
pp. 19135-19143 ◽  
Author(s):  
Kelly L. Stano ◽  
Murphy Carroll ◽  
Richard Padbury ◽  
Marian McCord ◽  
Jesse S. Jur ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Carbon Nanotube Arrays ◽  
Layer Deposition ◽  
Vertically Aligned

Retention of Surface Structure Causes Lower Density in Atomic Layer Deposition of Amorphous Titanium Oxide Thin Films

2021 ◽  
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Structure ◽  
Titanium Oxide ◽  
Size Effects ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Structural Modifications ◽  
Layer Deposition ◽  
Amorphous Tio2

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...

Effects of Chlorine in Titanium Oxide on Palladium Atomic Layer Deposition

2014 ◽  
Vol 118 (39) ◽  
pp. 22611-22619 ◽  
Author(s):  
Yu Lei ◽  
Bin Liu ◽  
Junling Lu ◽  
Joseph A. Libera ◽  
Jeffrey P. Greeley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances

2015 ◽  
Vol 26 (6) ◽  
pp. 064002 ◽  
Author(s):  
Giuseppe Fiorentino ◽  
Sten Vollebregt ◽  
F D Tichelaar ◽  
Ryoichi Ishihara ◽  
Pasqualina M Sarro
Keyword(s):  
Carbon Nanotube ◽  
Solid State ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Nucleation and Initial Stages of Growth during the Atomic Layer Deposition of Titanium Oxide on Mesoporous Silica

Nano Letters ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 6884-6890
Author(s):  
Wang Ke ◽  
Yang Liu ◽  
Xuelong Wang ◽  
Xiangdong Qin ◽  
Limei Chen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Mesoporous Silica ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Stages Of Growth ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document