Retention of Surface Structure Causes Lower Density in Atomic Layer Deposition of Amorphous Titanium Oxide Thin Films

2021 ◽  
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Structure ◽  
Titanium Oxide ◽  
Size Effects ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Structural Modifications ◽  
Layer Deposition ◽  
Amorphous Tio2

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...

Dysprosium oxide and dysprosium-oxide-doped titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 33 (1) ◽  
pp. 01A127 ◽  
Author(s):  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Lauri Aarik ◽  
Jaan Aarik ◽  
Kaupo Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Dysprosium Oxide ◽  
Layer Deposition

Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO2 deposited using atomic layer deposition

Nanoscale ◽  
2013 ◽  
Vol 5 (11) ◽  
pp. 5001 ◽  
Author(s):  
Sreeprasanth Pulinthanathu Sree ◽  
Jolien Dendooven ◽  
Kasper Masschaele ◽  
Heidari M. Hamed ◽  
Shaoren Deng ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Mesoporous Silica ◽  
Atomic Layer ◽  
Silica Thin Films ◽  
Layer Deposition ◽  
Amorphous Tio2 ◽  
Anatase Nanoparticles

Pseudocapacitance of Amorphous TiO2 Thin Films Anchored to Graphene and Carbon Nanotubes Using Atomic Layer Deposition

2013 ◽  
Vol 117 (44) ◽  
pp. 22497-22508 ◽  
Author(s):  
Xiang Sun ◽  
Ming Xie ◽  
Jonathan J. Travis ◽  
Gongkai Wang ◽  
Hongtao Sun ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Nanotubes ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition ◽  
Amorphous Tio2

Holmium titanium oxide thin films grown by atomic layer deposition

2014 ◽  
Vol 565 ◽  
pp. 261-266 ◽  
Author(s):  
Kaupo Kukli ◽  
Marianna Kemell ◽  
Mukesh Chandra Dimri ◽  
Esa Puukilainen ◽  
Aile Tamm ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Atomic layer deposition of ferromagnetic cobalt doped titanium oxide thin films

2011 ◽  
Vol 519 (10) ◽  
pp. 3318-3324 ◽  
Author(s):  
Viljami Pore ◽  
Mukesh Dimri ◽  
Himani Khanduri ◽  
Raivo Stern ◽  
Jun Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Ferromagnetic Cobalt

Stabilization of n-cadmium telluride photoanodes for water oxidation to O2(g) in aqueous alkaline electrolytes using amorphous TiO2 films formed by atomic-layer deposition

2014 ◽  
Vol 7 (10) ◽  
pp. 3334-3337 ◽  
Author(s):  
Michael F. Lichterman ◽  
Azhar I. Carim ◽  
Matthew T. McDowell ◽  
Shu Hu ◽  
Harry B. Gray ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Cadmium Telluride ◽  
Water Oxidation ◽  
Atomic Layer ◽  
Alkaline Media ◽  
Tio2 Films ◽  
Layer Deposition ◽  
Alkaline Electrolytes ◽  
Amorphous Tio2

Protection of n-CdTe by ALD-grown TiO2 film for water oxidation to O2(g) in alkaline media.

Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 591 ◽  
pp. 55-59 ◽  
Author(s):  
H. Castán ◽  
H. García ◽  
S. Dueñas ◽  
L. Bailón ◽  
E. Miranda ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition

2019 ◽  
Vol 217 (13) ◽  
pp. 1800769 ◽  
Author(s):  
Alireza M. Kia ◽  
Sascha Bönhardt ◽  
Sabine Zybell ◽  
Kati Kühnel ◽  
Nora Haufe ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Material Component ◽  
Battery Material

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

2012 ◽  
Vol 210 (2) ◽  
pp. 276-284 ◽  
Author(s):  
Jaesang Lee ◽  
Seung Jae Lee ◽  
Won Bae Han ◽  
Heeyoung Jeon ◽  
Jingyu Park ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Temperature Dependence ◽  
Titanium Oxide ◽  
Deposition Temperature ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition
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