Characteristics of Slurry Recycling in Chemical Mechanical Polishing (CMP) of Fused Silica (FS)

2019 ◽  
Vol 8 (3) ◽  
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Author(s):  
Yan Zhou ◽  
Haimei Luo ◽  
Guihai Luo ◽  
Chengxi Kang ◽  
Gaopan Chen ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Fused Silica ◽  
Mechanical Polishing

scholarly journals Investigation of the Chemical Residuals on the Fused Silica during Chemical Mechanical Polishing

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Vol 3 (31) ◽  
pp. 8930-8935 ◽  
Author(s):  
Li Xu ◽  
Gaopan Chen ◽  
Haimei Luo ◽  
Xiaolei Shi ◽  
Guihai Luo ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Fused Silica ◽  
Mechanical Polishing

Study on Pad Performance Deterioration in Chemical Mechanical Polishing (CMP) of Fused Silica

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Vol 7 (6) ◽  
pp. P295-P298 ◽  
Author(s):  
Yan Zhou ◽  
Haimei Luo ◽  
Guoshun Pan ◽  
Chunli Zou ◽  
Guihai Luo ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Fused Silica ◽  
Mechanical Polishing ◽  
Performance Deterioration

The Cycle Characteristics of Slurries in Chemical Mechanical Polishing (CMP) of Fused Silica

2020 ◽  
Vol 5 (30) ◽  
pp. 9350-9356
Author(s):  
Chengxi Kang ◽  
Bin Gao ◽  
Dan Guo ◽  
Haimei Luo ◽  
Guoshun Pan
Keyword(s):  
Chemical Mechanical Polishing ◽  
Fused Silica ◽  
Mechanical Polishing

Chemical Mechanical Polishing (CMP) of Fused Silica (FS) Using Ceria Slurry Recycling

2020 ◽  
Vol 9 (4) ◽  
pp. 044002
Author(s):  
Yan Zhou ◽  
Haimei Luo ◽  
Guihai Luo ◽  
Gaopan Chen ◽  
Chengxi Kang ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Fused Silica ◽  
Mechanical Polishing
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