Effect of Ti∕Cu Source∕Drain on an Amorphous IGZO TFT Employing SiNx Passivation for Low Data-Line Resistance

2012 ◽  
Vol 15 (4) ◽  
pp. H126 ◽  
Author(s):  
Young Wook Lee ◽  
Sun-Jae Kim ◽  
Soo-Yeon Lee ◽  
Woo-Geun Lee ◽  
Kap-Soo Yoon ◽  
...  
Keyword(s):  
2011 ◽  
Vol 1321 ◽  
Author(s):  
Young Wook Lee ◽  
Sung-Hwan Choi ◽  
Jeong-Soo Lee ◽  
Jang-Yeon Kwon ◽  
Min-Koo Han

ABSTRACTWe successfully fabricated a-IGZO TFTs employing a Ti/Cu source/drain (S/D) and SiNx passivation in order to reduce the line-resistance, as compared to most oxide TFTs that use Mo (or TCO) and SiO2 for their S/D and passivation, respectively. Although passivated with SiNx, the TFT exhibits good transfer characteristics without a negative shift. However, the TFT employing a Mo S/D exhibited conductor-like characteristics when passivated with SiNx. Our investigation suggests that the IGZO oxygen vacancies found in the Ti/Cu S/D are controlled, resulting in low concentrations, and so prevent the SiNx-passivated TFT from having a negative shift.


2020 ◽  
Vol 35 (10) ◽  
pp. 1036-1043
Author(s):  
Chen LIN ◽  
◽  
Yu-chun FENG ◽  
Xi CHEN ◽  
Gui-quan TANG ◽  
...  
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2021 ◽  
Vol 11 (1) ◽  
pp. 9
Author(s):  
Fernando Leonel Aguirre ◽  
Nicolás M. Gomez ◽  
Sebastián Matías Pazos ◽  
Félix Palumbo ◽  
Jordi Suñé ◽  
...  

In this paper, we extend the application of the Quasi-Static Memdiode model to the realistic SPICE simulation of memristor-based single (SLPs) and multilayer perceptrons (MLPs) intended for large dataset pattern recognition. By considering ex-situ training and the classification of the hand-written characters of the MNIST database, we evaluate the degradation of the inference accuracy due to the interconnection resistances for MLPs involving up to three hidden neural layers. Two approaches to reduce the impact of the line resistance are considered and implemented in our simulations, they are the inclusion of an iterative calibration algorithm and the partitioning of the synaptic layers into smaller blocks. The obtained results indicate that MLPs are more sensitive to the line resistance effect than SLPs and that partitioning is the most effective way to minimize the impact of high line resistance values.


2021 ◽  
Vol 52 (1) ◽  
pp. 1100-1103
Author(s):  
Yingtao Xie ◽  
Penglong Chen ◽  
Kunlin Cai ◽  
Shuyun Jia ◽  
Chunyan Yang ◽  
...  
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Author(s):  
Mehadi Aman ◽  
Yujiro Takeda ◽  
Kazuatsu Ito ◽  
Kaoru Yamamoto ◽  
Kohei Tanaka ◽  
...  

2021 ◽  
Vol 68 (4) ◽  
pp. 2049-2055
Author(s):  
Jingrui Guo ◽  
Ying Zhao ◽  
Guanhua Yang ◽  
Xichen Chuai ◽  
Wenhao Lu ◽  
...  

2021 ◽  
Vol 52 (S1) ◽  
pp. 420-422
Author(s):  
Wei Chen ◽  
Jhih-Jie Huang ◽  
Yuhuai Chen ◽  
Yao Qian ◽  
Sangsang Ruan ◽  
...  
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