Effect of Reverse Pulse on Additives Adsorption and Copper Filling for Through Silicon Via

2018 ◽  
Vol 166 (1) ◽  
pp. D3006-D3012 ◽  
Author(s):  
Q. S. Zhu ◽  
X. Zhang ◽  
C. Z. Liu ◽  
H. Y. Liu
Keyword(s):  
Through Silicon Via ◽  
Reverse Pulse

Front End of Line Through Silicon Via (TSV) Integration

2008 ◽  
Author(s):  
Subhash L. Shinde ◽  
Todd M. Bauer ◽  
Jordan E. Massad ◽  
Dale L. Hetherington
Keyword(s):  
Through Silicon Via ◽  
Front End

A Region-Based Through-Silicon via Repair Method for Clustered Faults

2017 ◽  
Vol E100.C (12) ◽  
pp. 1108-1117 ◽  
Author(s):  
Tianming NI ◽  
Huaguo LIANG ◽  
Mu NIE ◽  
Xiumin XU ◽  
Aibin YAN ◽  
...  
Keyword(s):  
Through Silicon Via ◽  
Repair Method

Through-silicon via plating void metrology using focused ion beam mill

2012 ◽  
Author(s):  
A. C. Rudack ◽  
J. Nadeau ◽  
R. Routh ◽  
R. J. Young
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Through Silicon Via

Robust Process Design towards through-Silicon via Quality Improvement Based on Grey-Taguchi Method

2012 ◽  
Vol 217-219 ◽  
pp. 2183-2186
Author(s):  
Chao Wei Tang ◽  
Li Chang Chuang ◽  
Hong Tsu Young ◽  
Mike Yang ◽  
Hsueh Chuan Liao
Keyword(s):  
Taguchi Method ◽  
Grey Relational Analysis ◽  
Chemical Etching ◽  
Through Silicon Via ◽  
Relational Analysis ◽  
Wet Chemical ◽  
Wet Chemical Etching ◽  
Etching Parameters ◽  
Grey Relational ◽  
Grey Taguchi

The robust design of chemical etching parameters is dealing with the optimization of the through-silicon via (TSV) roundness error and TSV lateral etching depth in the etching of silicon for laser drilled TSVs. The considered wet chemical etching parameters comprise the HNO3 molarity, HF molarity, and etching time. Grey-Taguchi method is combining the orthogonal array design of experiments with Grey relational analysis (GRA), which enables the determination of the optimal combination of wet chemical etching parameters for multiple process responses. The concept of Grey relational analysis is to find a Grey relational grade, which can be used for the optimization conversion from a multiple objective case to a single objective case. Also, GRG is used to investigate the parameter effects to the overall quality targets.

Sign in / Sign up

Export Citation Format

Share Document