(Invited) III-Nitride Heterojunction Field-Effect Transistors and Heterojunction Bipolar Transistors for Next-Generation Power Electronics

2019 ◽  
Vol 41 (8) ◽  
pp. 73-85
Author(s):  
Russell D. Dupuis ◽  
Shyh-Chiang Shen ◽  
Zachary M. Lochner ◽  
Hee-Jin Kim ◽  
Yi-Chi Lee ◽  
...  
1991 ◽  
Vol 239 ◽  
Author(s):  
N. David Theodore ◽  
Peter Fejes ◽  
Mamoru Tomozane ◽  
Ming Liaw

ABSTRACTSiGe is of interest for use in heterojunction-bipolar transistors, infrared detectors and field-effect transistors. In this study, graded SiGe heterolayers grown on Si, and heterolayers grown on SIMOX by CVD, were characterized using TEM. The graded-heterolayers consisted of ten layers of Si1-xGex on substrate silicon. Misfit dislocations were present at interfaces in the bottom 4–5 layers of the heterostructure. This conforms with predictions from qualitative strain-energy considerations. The greatest density of misfit dislocations was present at the Si1-xGex interface between the bottom two layers of the heterostructure. Dislocations were observed to extend out of the interface and up into the heterolayer structure. The defects were found to interact with interfaces in the structure and finally cease extending upwards towards the surface of the wafer. In addition to graded heterolayers, SiGe heterolayers grown on SIMOX were also investigated. The structures consisted of epi-silicon grown on a Si/Si1-xGex superlattice which was in turn grown on a Si/SiO2 (SIMOX) structure. The behavior of defects in the layers was of interest. TEM characterization showed a large density of extended-defects present in the layers. Dislocations were observed to originate at the SIMOX oxide/Si interface, propagate up through the SiGe superlattice and into the epi-Si layer. Some dislocations were found to interact with the SiGe superlattice and cease propagating up towards the top of the wafer. SiGe superlattices with a higher concentration of Ge are more effective in reducing defect propagation towards the surface of the wafer.


Author(s):  
N. David Theodore ◽  
Mamoru Tomozane ◽  
Ming Liaw

There is extensive interest in SiGe for use in heterojunction bipolar transistors. SiGe/Si superlattices are also of interest because of their potential for use in infrared detectors and field-effect transistors. The processing required for these materials is quite compatible with existing silicon technology. However, before SiGe can be used extensively for devices, there is a need to understand and then control the origin and behavior of defects in the materials. The present study was aimed at investigating the structural quality of, and the behavior of defects in, graded SiGe layers grown by chemical vapor deposition (CVD).The structures investigated in this study consisted of Si1-xGex[x=0.16]/Si1-xGex[x= 0.14, 0.13, 0.12, 0.10, 0.09, 0.07, 0.05, 0.04, 0.005, 0]/epi-Si/substrate heterolayers grown by CVD. The Si1-xGex layers were isochronally grown [t = 0.4 minutes per layer], with gas-flow rates being adjusted to control composition. Cross-section TEM specimens were prepared in the 110 geometry. These were then analyzed using two-beam bright-field, dark-field and weak-beam images. A JEOL JEM 200CX transmission electron microscope was used, operating at 200 kV.


2013 ◽  
Vol 1 (13) ◽  
pp. 2433 ◽  
Author(s):  
Sreenivasa Reddy Puniredd ◽  
Adam Kiersnowski ◽  
Glauco Battagliarin ◽  
Wojciech Zajączkowski ◽  
Wallace W. H. Wong ◽  
...  

2018 ◽  
Vol 57 (6S3) ◽  
pp. 06KA03
Author(s):  
Kenta Watanabe ◽  
Daiki Terashima ◽  
Mikito Nozaki ◽  
Takahiro Yamada ◽  
Satoshi Nakazawa ◽  
...  

2013 ◽  
Vol 103 (16) ◽  
pp. 163504 ◽  
Author(s):  
C. Y. Zhu ◽  
F. Zhang ◽  
R. A. Ferreyra ◽  
V. Avrutin ◽  
Ü. Özgür ◽  
...  

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