Characterization of Modification of 193-nm Photoresist by HBr Plasma

2011 ◽  
Vol 14 (10) ◽  
pp. H408 ◽  
Author(s):  
G. Vereecke ◽  
M. Claes ◽  
Q.T. Le ◽  
E. Kesters ◽  
H. Struyf ◽  
...  
Keyword(s):  
193 Nm ◽  
Hbr Plasma

Characterization of photo-acid redeposition in 193-nm photoresists

2007 ◽  
Author(s):  
Thomas Wallow ◽  
Marina Plat ◽  
Zhanping Zhang ◽  
Brian MacDonald ◽  
Joffre Bernard ◽  
...  
Keyword(s):  
193 Nm

scholarly journals Structural characterization of holo- and apo-myoglobin in the gas phase by ultraviolet photodissociation mass spectrometry

2015 ◽  
Vol 6 (2) ◽  
pp. 1324-1333 ◽  
Author(s):  
Michael B. Cammarata ◽  
Jennifer S. Brodbelt
Keyword(s):  
Mass Spectrometry ◽  
Gas Phase ◽  
Structural Characterization ◽  
Ultraviolet Photodissociation ◽  
193 Nm

193 nm UV photodissociation of myoglobin in the gas phase showed preferential backbone cleavages in regions with higher relative B-factors.

Characterization of 193-nm resists for optical mask manufacturing

2004 ◽  
Author(s):  
Hans Fosshaug ◽  
Adisa Paulsson ◽  
Uldis Berzinsh ◽  
Helena Magnusson
Keyword(s):  
193 Nm

scholarly journals Characterization of Disulfide Linkages in Proteins by 193 nm Ultraviolet Photodissociation (UVPD) Mass Spectrometry

2018 ◽  
Vol 90 (14) ◽  
pp. 8523-8530 ◽  
Author(s):  
M. Montana Quick ◽  
Christopher M. Crittenden ◽  
Jake A. Rosenberg ◽  
Jennifer S. Brodbelt
Keyword(s):  
Mass Spectrometry ◽  
Ultraviolet Photodissociation ◽  
Disulfide Linkages ◽  
193 Nm

HBr Plasma Treatment Versus VUV Light Treatment to Improve 193 nm Photoresist Pattern Linewidth Roughness

2011 ◽  
Vol 8 (12) ◽  
pp. 1184-1195 ◽  
Author(s):  
Erwine Pargon ◽  
Laurent Azarnouche ◽  
Marc Fouchier ◽  
Kevin Menguelti ◽  
Raluca Tiron ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Light Treatment ◽  
193 Nm ◽  
Hbr Plasma

SYNTHESIS AND CHARACTERIZATION OF NANOSIZED Mg(OH)2 AND ITS NANOCOMPOSITE WITH POLY (VINYL ALCOHOL)

NANO ◽  
2009 ◽  
Vol 04 (03) ◽  
pp. 147-156 ◽  
Author(s):  
M. FATHIMA PARVEEN ◽  
S. UMAPATHY ◽  
V. DHANALAKSHMI ◽  
R. ANBARASAN
Keyword(s):  
Visible Spectrum ◽  
Precipitation Method ◽  
Synthesis And Characterization ◽  
Poly Vinyl Alcohol ◽  
Lower Intensity ◽  
Uv Visible ◽  
C 50 ◽  
Co Precipitation ◽  
193 Nm

Nano- Mg(OH) 2 was synthesized by co-precipitation method. Peaks between 500 and 1250 cm-1 in FTIR spectroscopy confirmed the presence of metal hydroxide stretching. TGA inferred that above 600°C, 50% of residue weight remained. HRTEM of nanocomposite gave an idea about the nonspherical morphology of particles of size 25 nm to 30 nm. SEM inferred that flower-like morphology for pristine Mg(OH) 2 and higher % weight of aniline-intercalated Mg(OH) 2 had agglomerated structure. UV visible spectrum inferred the presence of Mg 2+ ion at 275 nm and the presence of amino-group-intercalated Mg(OH) 2, which had a sharp peak at 193 nm and the intensity of which increases with the increase in % weight of aniline. PL inferred that aniline-intercalated Mg(OH) 2 showed a lower intensity of which increased with higher wavelength value than the pristine and nanocomposite with PVA.

Long-term test and characterization of optical components at 193 nm and 157 nm

2000 ◽  
Author(s):  
Klaus Vogler ◽  
Ingo Klaft ◽  
Thomas Schroeder ◽  
Uwe Stamm ◽  
Klaus R. Mann ◽  
...  
Keyword(s):  
Optical Components ◽  
193 Nm
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