HBr Plasma Treatment Versus VUV Light Treatment to Improve 193 nm Photoresist Pattern Linewidth Roughness

2011 ◽  
Vol 8 (12) ◽  
pp. 1184-1195 ◽  
Author(s):  
Erwine Pargon ◽  
Laurent Azarnouche ◽  
Marc Fouchier ◽  
Kevin Menguelti ◽  
Raluca Tiron ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Light Treatment ◽  
193 Nm ◽  
Hbr Plasma

Revisiting the mechanisms involved in Line Width Roughness smoothing of 193 nm photoresist patterns during HBr plasma treatment

2013 ◽  
Vol 113 (1) ◽  
pp. 013302 ◽  
Author(s):  
M. Brihoum ◽  
R. Ramos ◽  
K. Menguelti ◽  
G. Cunge ◽  
E. Pargon ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Line Width ◽  
193 Nm ◽  
Hbr Plasma

Characterization of Modification of 193-nm Photoresist by HBr Plasma

2011 ◽  
Vol 14 (10) ◽  
pp. H408 ◽  
Author(s):  
G. Vereecke ◽  
M. Claes ◽  
Q.T. Le ◽  
E. Kesters ◽  
H. Struyf ◽  
...  
Keyword(s):  
193 Nm ◽  
Hbr Plasma

Activity of Ag Nanoparticle Supported Zeolite after Plasma Treatment

2013 ◽  
Vol 133 (3) ◽  
pp. 144-145 ◽  
Author(s):  
Yoshiyuki Teramoto ◽  
Hyun-Ha Kim ◽  
Atsushi Ogata ◽  
Nobuaki Negishi
Keyword(s):  
Plasma Treatment ◽  
Ag Nanoparticle

Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air

2019 ◽  
Vol 139 (7) ◽  
pp. 217-218
Author(s):  
Michitaka Yamamoto ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Tadatomo Suga ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Room Temperature ◽  
Ambient Air ◽  
Wafer Scale ◽  
Treatment Conditions

THE MODIFICATION OF PAPER INDUCED BY RADIO FREQUENCY AND MICROWAVE PLASMA TREATMENT

2007 ◽  
Vol 11 (4) ◽  
pp. 593-600
Author(s):  
V. V. Azharonok ◽  
I. I. Filatova ◽  
A. P. Dostanko ◽  
S. V. Bordusov ◽  
Yu. S. Shynkevich
Keyword(s):  
Radio Frequency ◽  
Plasma Treatment ◽  
Microwave Plasma

Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical's Intensity: An EPR study

2020 ◽  
Author(s):  
Pankaj Attri ◽  
Anan Teruki ◽  
Ryo Arita ◽  
Takamasa Okumura ◽  
Hayate Tanaka ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Treatment Effect ◽  
Barley Seed ◽  
Paramagnetic Species
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