Nickel Silicide Formation using Pulsed Laser Annealing for nMOSFET Performance Improvement

2011 ◽  
Vol 158 (8) ◽  
pp. H840 ◽  
Author(s):  
Hou-Yu Chen ◽  
Chia-Yi Lin ◽  
Min-Cheng Chen ◽  
Chien-Chao Huang ◽  
Chao-Hsin Chien
Keyword(s):  
Performance Improvement ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Nickel Silicide ◽  
Silicide Formation ◽  
Pulsed Laser Annealing

The effect of pulsed laser annealing on the nickel silicide formation

2010 ◽  
Vol 87 (12) ◽  
pp. 2540-2543 ◽  
Author(s):  
Hou-Yu Chen ◽  
Chia-Yi Lin ◽  
Chien-Chao Huang ◽  
Chao-Hsin Chien
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Nickel Silicide ◽  
Silicide Formation ◽  
Pulsed Laser Annealing

scholarly journals Nickel silicide formation using multiple-pulsed laser annealing

2007 ◽  
Vol 101 (3) ◽  
pp. 034307 ◽  
Author(s):  
Y. Setiawan ◽  
P. S. Lee ◽  
K. L. Pey ◽  
X. C. Wang ◽  
G. C. Lim ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Nickel Silicide ◽  
Silicide Formation ◽  
Pulsed Laser Annealing

Pulsed laser annealing of zinc implanted GaAs

1978 ◽  
Vol 14 (4) ◽  
pp. 85 ◽  
Author(s):  
S.S. Kular ◽  
B.J. Sealy ◽  
K.G. Stephens ◽  
D.R. Chick ◽  
Q.V. Davis ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing

Ferroelectric Hf 0.5 Zr 0.5 O 2 Thin Films Crystallized by Pulsed Laser Annealing

2021 ◽  
Author(s):  
Natalia Volodina ◽  
Anna Dmitriyeva ◽  
Anastasia Chouprik ◽  
Elena Gatskevich ◽  
Andrei Zenkevich
Keyword(s):  
Thin Films ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing

scholarly journals Devitrification of thin film Cu-Zr metallic glass via ultrashort pulsed laser annealing

2021 ◽  
pp. 161437
Author(s):  
J. Antonowicz ◽  
P. Zalden ◽  
K. Sokolowski-Tinten ◽  
K. Georgarakis ◽  
R. Minikayev ◽  
...  
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing ◽  
Ultrashort Pulsed Laser

Dynamic behaviors of pulsed-laser annealing in ion-implanted silicon studied by measuring the optical reflectance

1979 ◽  
Author(s):  
Kouichi Murakami ◽  
Kenji Gamo ◽  
Susumu Namba ◽  
Mitsuo Kawabe ◽  
Yoshinobu Aoyagi ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Optical Reflectance ◽  
Dynamic Behaviors ◽  
Pulsed Laser Annealing ◽  
Ion Implanted

Extended defect structure induced by pulsed laser annealing in Ge implanted Si crystal

2001 ◽  
Vol 328 (1-2) ◽  
pp. 242-247 ◽  
Author(s):  
D. Klinger ◽  
M. Lefeld-Sosnowska ◽  
J. Auleytner ◽  
D. Żymierska ◽  
L. Nowicki ◽  
...  
Keyword(s):  
Defect Structure ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Extended Defect ◽  
Pulsed Laser Annealing
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