Influence of the Pressure on ZnO:Al Film Deposited by DC Magnetron Reactive Sputtering

2019 ◽  
Vol 34 (1) ◽  
pp. 551-555
Author(s):  
Song Yu ◽  
H. D. Yang ◽  
Bo Huang ◽  
J.D. Shi ◽  
L. X. Zeng
Keyword(s):  
Reactive Sputtering ◽  
Dc Magnetron Reactive Sputtering

Properties of ZnO:Al films on polyester produced by dc magnetron reactive sputtering

2001 ◽  
Vol 48 (3-4) ◽  
pp. 137-143 ◽  
Author(s):  
M. Chen ◽  
Z.L. Pei ◽  
X. Wang ◽  
C. Sun ◽  
L.S. Wen
Keyword(s):  
Reactive Sputtering ◽  
Dc Magnetron Reactive Sputtering

Photosensitive a-Si:H devices fabricated by DC magnetron reactive sputtering

1987 ◽  
Vol 90 (1-3) ◽  
pp. 255-258 ◽  
Author(s):  
T.I. Taurbaev ◽  
R.M. Aitmambetov ◽  
E.A. Swanbaev ◽  
S.M. Manakov ◽  
M.D. Suleimenov
Keyword(s):  
Reactive Sputtering ◽  
Dc Magnetron Reactive Sputtering

Formation of Al-doped ZnO films by dc magnetron reactive sputtering

2001 ◽  
Vol 48 (3-4) ◽  
pp. 194-198 ◽  
Author(s):  
M. Chen ◽  
Z.L. Pei ◽  
C. Sun ◽  
L.S. Wen ◽  
X. Wang
Keyword(s):  
Reactive Sputtering ◽  
Zno Films ◽  
Doped Zno ◽  
Dc Magnetron Reactive Sputtering
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