Growth Rate Control in ALD by Surface Functionalization: Alkyl Alcohols on Metal Oxides

2019 ◽  
Vol 33 (2) ◽  
pp. 333-342 ◽  
Author(s):  
Angel Yanguas-Gil ◽  
J. W. Elam
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Vol 91 (19) ◽  
pp. 193102 ◽  
Author(s):  
Itaru Gunjishima ◽  
Takashi Inoue ◽  
Atsuto Okamoto

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Vol 26 (2) ◽  
pp. 185-188
Author(s):  
M. Keulers ◽  
L. Ariaans ◽  
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pp. 911-917 ◽  
Author(s):  
Danièle Joseleau-Petit ◽  
Danielle Thévenet ◽  
Richard D'Arl

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