Growth Rate Control in ALD by Surface Functionalization: Alkyl Alcohols on Metal Oxides
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1990 ◽
Vol 54
(2)
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pp. 89-100
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1994 ◽
Vol 13
(5)
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pp. 911-917
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2005 ◽
Vol 80
(11)
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pp. 1268-1272
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