(Invited) Room Temperature Bonding of Wafers with Thin Nanocrystalline Metal Films

2019 ◽  
Vol 33 (4) ◽  
pp. 61-72 ◽  
Author(s):  
Takehito Shimatsu ◽  
Miyuki Uomoto
Keyword(s):  
Room Temperature ◽  
Metal Films ◽  
Nanocrystalline Metal

scholarly journals Enhanced Quality Nanocrystalline Metal Films Produced By Dendrimer Mediated Thin Film Growth

2002 ◽  
Vol 8 (S02) ◽  
pp. 1120-1121 ◽  
Author(s):  
Fengting Xu ◽  
Long Li ◽  
Judith C. Yang ◽  
Shane C. Street ◽  
John A. Barnard
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Metal Films ◽  
Thin Film Growth ◽  
Nanocrystalline Metal

Grain coalescence and its effect on stress and elasticity in nanocrystalline metal films

2007 ◽  
Vol 55 (3) ◽  
pp. 777-784 ◽  
Author(s):  
N.R. Shamsutdinov ◽  
A.J. Böttger ◽  
B.J. Thijsse
Keyword(s):  
Metal Films ◽  
Nanocrystalline Metal ◽  
Grain Coalescence

Room temperature wafer bonding of metal films using flattening by thermal imprint process

2013 ◽  
Vol 112 ◽  
pp. 52-56 ◽  
Author(s):  
Yuichi Kurashima ◽  
Atsuhiko Maeda ◽  
Ryo Takigawa ◽  
Hideki Takagi
Keyword(s):  
Wafer Bonding ◽  
Room Temperature ◽  
Metal Films

Production of Ultra-Thin Metal Films Using Neutral Cluster Beams

1990 ◽  
Vol 206 ◽  
Author(s):  
A. Ramachandra ◽  
M. Vaziri ◽  
R.P. Andres
Keyword(s):  
Thin Films ◽  
Electrical Conductivity ◽  
Room Temperature ◽  
Vacuum Chamber ◽  
Metal Films ◽  
Gold Clusters ◽  
Cluster Beam ◽  
Neutral Cluster ◽  
Finite Electrical Conductivity ◽  
Cluster Beams

ABSTRACTGold clusters (diam. = 1.0 ± .5 nm) are prepared in a gas aggregation source (MECS), expanded into a vacuum chamber to form a neutral cluster beam, and deposited at low impact velocity on room temperature substrates. When several monolayers of these clusters are deposited on clean substrates (nitrocellulose, glass, mica, NaCl), they form smooth ultra-thin films. These cluster-assembled films appear to be similar in quality to those produced by the Takagi-Yamada ion cluster beam process. They exhibit finite electrical conductivity at thicknesses much smaller than is the case with atomically evaporated films. They are extremely uniform and smooth with a surface height that typically varies less than 1 nm across the entire film.

scholarly journals Atomic Diffusion Bonding with Thin Nanocrystalline Metal Films

Materia Japan ◽  
2010 ◽  
Vol 49 (11) ◽  
pp. 521-527 ◽  
Author(s):  
Takehito Shimatsu ◽  
Miyuki Uomoto
Keyword(s):  
Diffusion Bonding ◽  
Metal Films ◽  
Atomic Diffusion ◽  
Nanocrystalline Metal
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