MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
2002 ◽
Vol 8
(S02)
◽
pp. 1120-1121
◽
2006 ◽
Vol 51
(9)
◽
pp. 1039-1049
◽
Keyword(s):
1996 ◽
Vol 235-238
◽
pp. 267-272
◽
Keyword(s):
1998 ◽
Vol 323
(1-2)
◽
pp. 183-187
◽
Keyword(s):
1960 ◽
Vol 254
(1277)
◽
pp. 163-176
◽
Keyword(s):