Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

2010 ◽  
Vol 28 (3) ◽  
pp. 595-607 ◽  
Author(s):  
M. Rommel ◽  
G. Spoldi ◽  
V. Yanev ◽  
S. Beuer ◽  
B. Amon ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Microscopy Techniques ◽  
Comprehensive Study

scholarly journals Advanced Photomask Defect Repairing Technology Using FIB and SPM

2008 ◽  
Vol 2 (1) ◽  
pp. 64-69 ◽  
Author(s):  
Osamu Takaoka ◽  
Keyword(s):  
Scanning Probe Microscopy ◽  
Industrial Application ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Accuracy ◽  
Scanning Probe ◽  
Precision Positioning ◽  
Probe Microscopy

SIINT has supplied high-accuracy microprocessing devices since 1985. As photomask defects are very minute, high-accuracy positioning as well as highaccuracy processing and height-controllability to secure printability are required of such devices. Conventionally devices based on focused ion beam (FIB) technology have been adopted to meet requirements for specifications. But there remain an increasing number of defects which cannot be covered by FIB. Recently developed, therefore, is a defect-repairing system to which scanning probe microscopy (SPM) has been applied in order to make up for the shortcomings inherent in FIB. This paper is intended to report on photomask-defect-repairing system based on FIB and SPM for industrial application which requires precision-positioning.

Probe modification for scanning-probe microscopy by the focused ion beam method

2012 ◽  
Vol 41 (1) ◽  
pp. 41-50 ◽  
Author(s):  
B. G. Konoplev ◽  
O. A. Ageev ◽  
V. A. Smirnov ◽  
A. S. Kolomiitsev ◽  
N. I. Serbu
Keyword(s):  
Scanning Probe Microscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Beam Method

2013 Microscopy Today Innovation Awards

2013 ◽  
Vol 21 (5) ◽  
pp. 40-45
Keyword(s):  
Electron Microscopy ◽  
Light Microscopy ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Analysis Methods ◽  
Microscopy Analysis ◽  
Ion Microscopy ◽  
Microscopy Techniques

Microscopy Today congratulates the fourth annual group of Innovation Award winners. The ten innovations described below move several microscopy techniques forward: light microscopy, scanning probe microscopy, electron microscopy, ion microscopy, and hybrid microscopy-analysis methods. These innovations will make imaging and analysis more powerful, more flexible, more productive, and easier to accomplish.

scholarly journals Origin of surface potential in undoped zinc oxide films revealed by advanced scanning probe microscopy techniques

RSC Advances ◽  
2017 ◽  
Vol 7 (67) ◽  
pp. 42393-42397
Author(s):  
Ting Su
Keyword(s):  
Zinc Oxide ◽  
Surface Potential ◽  
Scanning Probe Microscopy ◽  
Oxide Films ◽  
Scanning Probe ◽  
Zno Film ◽  
Probe Microscopy ◽  
Zinc Oxide Films ◽  
Combined Use ◽  
Microscopy Techniques

Surface potential of undoped ZnO film has been studied by a combined use of PFM and KPFM techniques.

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