The Role of Mobile Charge in Oxygen Plasma-Enhanced Silicon-to-Silicon Wafer Bonding

B. Raeissi; A. Sanz-Velasco; O. Engström

doi:10.1149/1.3355288

The Role of Mobile Charge in Oxygen Plasma-Enhanced Silicon-to-Silicon Wafer Bonding

Electrochemical and Solid-State Letters ◽

10.1149/1.3355288 ◽

2010 ◽

Vol 13 (6) ◽

pp. H179 ◽

Cited By ~ 2

Author(s):

B. Raeissi ◽

A. Sanz-Velasco ◽

O. Engström

Keyword(s):

Silicon Wafer ◽

Wafer Bonding ◽

Oxygen Plasma ◽

Mobile Charge

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The role of hydrogen in silicon wafer bonding: an infrared study

1995 IEEE International SOI Conference Proceedings ◽

10.1109/soi.1995.526513 ◽

2002 ◽

Author(s):

M.K. Weldon ◽

Y.J. Chabal ◽

S.B. Christman ◽

J. Bourcereau ◽

C.A. Goodwin ◽

...

Keyword(s):

Silicon Wafer ◽

Wafer Bonding ◽

Infrared Study

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Chemical role of oxygen plasma in wafer bonding using borosilicate glasses

Applied Physics Letters ◽

10.1063/1.1418454 ◽

2001 ◽

Vol 79 (21) ◽

pp. 3413-3415 ◽

Cited By ~ 2

Author(s):

D. M. Hansen ◽

C. E. Albaugh ◽

P. D. Moran ◽

T. F. Kuech

Keyword(s):

Wafer Bonding ◽

Oxygen Plasma ◽

Borosilicate Glasses

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Silicon-to-silicon wafer bonding using evaporated glass

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(98)00130-7 ◽

1998 ◽

Vol 70 (1-2) ◽

pp. 179-184 ◽

Cited By ~ 20

Author(s):

Steen Weichel ◽

Roger de Reus ◽

Michael Lindahl

Keyword(s):

Silicon Wafer ◽

Wafer Bonding

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Low Temperature Direct Silicon Wafer Bonding Using Argon Activation

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l527 ◽

1997 ◽

Vol 36 (Part 2, No. 5A) ◽

pp. L527-L528 ◽

Cited By ~ 11

Author(s):

Robert W. Bower ◽

Frank Y.-J. Chin

Keyword(s):

Low Temperature ◽

Silicon Wafer ◽

Wafer Bonding

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Role of Mobile Charge Carriers and Fluctuation Induced Conductivity in (Cu0.5Tl0.5−x K x )Ba2Ca3Cu1Zn3O12−δ Superconductor

Journal of Superconductivity and Novel Magnetism ◽

10.1007/s10948-011-1148-y ◽

2011 ◽

Vol 24 (6) ◽

pp. 1939-1945 ◽

Cited By ~ 1

Author(s):

M. Mumtaz ◽

Nawazish A. Khan ◽

S. M. Hasnain ◽

Adnan Younis

Keyword(s):

Charge Carriers ◽

Mobile Charge ◽

Fluctuation Induced Conductivity

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Silicon Wafer Bonding Mechanism for Silicon-on-Insulator Structures

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.l2311 ◽

1990 ◽

Vol 29 (Part 2, No. 12) ◽

pp. L2311-L2314 ◽

Cited By ~ 64

Author(s):

Takao Abe ◽

Tokio Takei ◽

Atsuo Uchiyama ◽

Katsuo Yoshizawa ◽

Yasuaki Nakazato

Keyword(s):

Silicon Wafer ◽

Wafer Bonding ◽

Silicon On Insulator ◽

Bonding Mechanism

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Bubble evolution mechanism and stress-induced crystallization in low-temperature silicon wafer bonding based on a thin intermediate amorphous Ge layer

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa81ee ◽

2017 ◽

Vol 50 (40) ◽

pp. 405305 ◽

Cited By ~ 2

Author(s):

Shaoying Ke ◽

Shaoming Lin ◽

Yujie Ye ◽

Danfeng Mao ◽

Wei Huang ◽

...

Keyword(s):

Low Temperature ◽

Silicon Wafer ◽

Wafer Bonding ◽

Evolution Mechanism ◽

Bubble Evolution ◽

Stress Induced Crystallization ◽

Induced Crystallization

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Silicon wafer‐to‐wafer bonding atT<200 °C with polymethylmethacrylate

Applied Physics Letters ◽

10.1063/1.112326 ◽

1994 ◽

Vol 65 (4) ◽

pp. 439-441 ◽

Cited By ~ 27

Author(s):

William P. Eaton ◽

Subhash H. Risbud ◽

Rosemary L. Smith

Keyword(s):

Silicon Wafer ◽

Wafer Bonding

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Silicon Wafer Bonding for use in Fuel Cells

ECS Meeting Abstracts ◽

10.1149/ma2006-02/30/1373 ◽

2006 ◽

Keyword(s):

Fuel Cells ◽

Silicon Wafer ◽

Wafer Bonding

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ChemInform Abstract: Analysis of Bonding-Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding.

ChemInform ◽

10.1002/chin.199726282 ◽

2010 ◽

Vol 28 (26) ◽

pp. no-no

Author(s):

S. MACK ◽

H. BAUMANN ◽

U. GOESELE ◽

H. WERNER ◽

R. SCHLOEGL

Keyword(s):

Silicon Wafer ◽

Wafer Bonding

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