Finite-Elements Simulation for True 3D Structure Generation of Anisotropic Electrochemical Wet-Etching Processes
Keyword(s):
Keyword(s):
1995 ◽
Vol 35
(3)
◽
pp. 479-493
◽
2015 ◽
Vol 2
(1)
◽
pp. 161-170
◽
Keyword(s):
2016 ◽
Vol 57
(666)
◽
pp. 616-621
Keyword(s):
2000 ◽
Vol 48
(4)
◽
pp. 629-631
◽